“…In summary, electron irradiation is preferred to create NV − ensembles optimized for sensing applications (Uedono et al, 1999;Campbell et al, 2002;Twitchen, Geoghegan, and Perkins, 2010), as this method allows for evenly distributed monovacancies to be created throughout the diamond in a timely manner, with less lattice damage than alternative methods. Theoretical calculations predict that monovacancy creation requires electron energies ≳165 keV (Campbell et al, 2002), roughly consistent with experiments observing vacancy creation down to 145 keV (McLellan et al, 2016;Eichhorn, McLellan, and Jayich, 2019). Older, less reliable experiments find vacancy creation for electron irradiation along the [100] direction at 180 keV but not 170 keV (Koike, Parkin, and Mitchell, 1992).…”