Optimizing the Dimensions of an Inverse-Magnetostrictive MEMS Pressure Sensor by Means of an Iterative Finite-Element Scheme

Löffler, M.; Nierla, Michael; Kadur, Madlen; Hoffmann, Marcel; Sutor, Alexander; Lerch, Reinhard

doi:10.1109/tmag.2016.2526629

Cited by 6 publications

(2 citation statements)

References 17 publications

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“…The magnetostrictive materials attracted much attention for sensing magnetic field owing to their high magnetic sensitivity, fast response, high preparation efficiency, and low cost [1]- [5]. Excellent sensor performances were achieved from the sensor prototypes employing some magnetostrictive materials as FeGa, Ni, FeCo [6]- [9].…”

Section: Introductionmentioning

confidence: 99%

Fatigue Characteristics of Magnetostrictive Thin-Film Coated Surface Acoustic Wave Devices for Sensing Magnetic Field

et al. 2020

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Magnetostrictive thin-film coated Surface Acoustic Wave (SAW) devices were promising for sensing magnetic field owing to their superior features as micro-size, fast response, and high sensitivity originated from the magnetostrictive effect. However, the magnetostriction nature in magnetostrictive thinfilm causes significantly mechanical fatigue in service, deteriorating the sensor performances. In this work, the fatigue phenomenon in magnetostrictive coating was underlined by characterizing the prepared FeCo thin-film coated magnetic device cyclically. Obvious shedding was observed in FeCo coating after cyclic testing and the magnetic-sensitivity decreases significantly. One of the reasons is the weak adhesion of FeCo thin-film towards the substrate. As an available way allowing enhancement of adhesion, a Cr thinfilm was employed as the transition-layer to weaken the mechanical fatigue. However, it accompanied by the issue of the reduced magnetostrictive coefficient and the obstruction in magnetostrain-tranfer to piezoelectric substrate. As a result, the slump in sensitivity was observed. To address such issues, a design of dotted-pattern with Cr transition layer was employed to build the SAW based magnetic-device. High magnetic-sensitivity and excellent long-term stability were achieved because of the release of coercive force in FeCo dots and enhancement of the FeCo adhesion to the substrate.INDEX TERMS Dotted-pattern, mechanical fatigue, magnetostrictive effect, SAW magnetic sensor, Cr transition layer.

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Section: Introductionmentioning

confidence: 99%

Fatigue Characteristics of Magnetostrictive Thin-Film Coated Surface Acoustic Wave Devices for Sensing Magnetic Field

et al. 2020

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“…In the 21 st century, the technology of MEMS promises revolution in different fields of applications [1,2]. The demand of MEMS structures for sensing pressure is still increasing owing to its better performance with improvement in technology which is becoming more significant day by day [3,4]. MEMS cantilever pressure sensor is a device that has support at one end to make it rigid and on application of pressure, the device exhibits maximum displacement at freely movable end.…”

Section: Introductionmentioning

confidence: 99%

Robust Design of Horn Shaped Piezo-Resistive Mems Pressure Sensor

Kumar

2018

International Journal of Simulation: Systems, Science &Amp; Technology

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The effective use of Micro Electro Mechanical Systems (MEMS) based cantilever sensor is application dependent and it is revolutionary for sensing pressure with improved sensitivity at modest fabrication design in research oriented projects. Micrometer scale piezo-resistive cantilever pressure sensors of two different shapes are modeled by using Bulk and Surface micromachining techniques on the Intellisuite simulation software. The layout of the Piezo-resistors is aligned along <110> orientation of p-type Silicon substrate with Aluminum interconnect to form a Wheatstone bridge configuration where output voltage is read out. A comparative study on different parameters such as displacement, von-mises stress and output voltage for the applied pressure is done by simulation, for the two different shapes of cantilever beams. The sensitivity of rectangular shaped sensor is 111mV/MPa. The sensitivity of horn shaped sensor is 185mV/MPa which is notably higher. This sensor can be used to measure contact pressure between surgical tool and organs during the surgery and for manipulation of living cells.

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Model and design of magnetostrictive flexible sensor for gesture recognition based on curvature and magnetism fusion

Wang,

Li,

Guo

et al. 2024

Measurement

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Optimizing the Dimensions of an Inverse-Magnetostrictive MEMS Pressure Sensor by Means of an Iterative Finite-Element Scheme

Cited by 6 publications

References 17 publications

Fatigue Characteristics of Magnetostrictive Thin-Film Coated Surface Acoustic Wave Devices for Sensing Magnetic Field

Fatigue Characteristics of Magnetostrictive Thin-Film Coated Surface Acoustic Wave Devices for Sensing Magnetic Field

Robust Design of Horn Shaped Piezo-Resistive Mems Pressure Sensor

Model and design of magnetostrictive flexible sensor for gesture recognition based on curvature and magnetism fusion

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