Optimizing the Design of a Magnetic Actuator for Scanning and Energy Harvesting MEMS Devices

Abstract

Among different types of energy-harvesting devices, the electrodynamic one is widely used due to the simple structure, high stability in time (better than piezoelectric materials). In the same time, the same structure could be applied for another application – scanning device. This article presents an analysis regarding the optimum design of the magnetic structure not as a bulk magnet, with specific problems during manufacturing, but as an array of micromagnets. The target function is the force acting on a mobile plate and the magnetic inductivity at that level.