Optimized‐geometry ARROW waveguides using TiO₂ as anti‐resonant layer

Abstract

The simulation, fabrication and characterization of ARROW waveguides using dielectric films deposited by Plasma Enhanced Chemical Vapor Deposition (PECVD) and Sputtering techniques, are presented in this work. Amorphous titanium oxide (TiO2) films were used as first cladding layer and silicon oxynitride (SiOxNy) films, as core layer. Furthermore, homemade routines based in two computational methods were used, for numerical simulations: Transfer Matrix Method (TMM) for the determination of the optimum thickness values of the Fabry‐Perot layers, and the Finite Difference Method (FDM) for 2D design and determination of the maximum width that allows single‐mode operation. The utilization of thermally grown silicon oxide as second anti‐resonant layer, along with improvements in the Reactive Ion Etching conditions for the definition of sidewalls of the optical waveguides were responsible for diminishing optical attenuations. Optimization of the waveguide rib height was done both through FDM simulations and experimentally. (© 2010 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Estrutura de microlâmpadas energizadas em escala micrométrica

“…Detalhes da fabricação do dispositivo são descritos no capítulo 3. Dado que o GNMD possui larga experiência na deposição de filmes finos extensos sobre diversos substratos utilizando PECVD e pulverização catódica (sputtering) [19][20][21][22][23][24][25][26][27][28] , a microlâmpada analisada neste trabalho foi produzida utilizando tais técnicas, bem como demais processos de microfabricação, conforme descrito a seguir.…”

“…estabilidade química e é resistente à corrosão [21,24,25,57,58] . As três fases mais comuns do dióxido de titânio são rutilo, anatase e brookite (figura 1.17).…”