Abstract:La 0.7 Sr 0.3 MnO 3 (LSMO) films with extraordinarily wide atomic terraces are epitaxially grown on SrTiO 3 (100) substrates by pulsed laser deposition. Atomic force microscopy measurements on the LSMO films show that the atomic step is ~ 4 Å and the atomic terrace width is more than 2 µm. For a 20 monolayers (MLs) LSMO film, the magnetization is determined to be 255 ± 15 emu/cm 3 at room temperature, corresponding to 1.70 ± 0.11 µ B perMn atom. As the thickness of LSMO increases from 8 MLs to 20 MLs, the critical thickness for the temperature dependent insulator-to-metal behavior transition is shown to be 9 MLs.Furthermore, post-annealing in oxygen environment improves the electron transport and magnetic properties of the LSMO films. has been widely used for efficient spin injection in organic spin valves [3][4][5][6][7][8] and giant tunneling magnetoresitance in magnetic tunnel junctions [9,10]. Regarding the synthesis of thin LSMO films, pulsed laser deposition (PLD) has been found to be a promising method to achieve high quality films with atomic scale variations [11][12][13][14]. Common to strongly correlated oxide materials, the intriguing magnetic and electron transport properties of LSMO are intimately related to the spin-lattice-charge couplings, which are sensitive to strain, growth condition, and the thickness of the films [14,15]. For example, the magnetic anisotropy of LSMO has been shown to be in-plane when it is grown on SrTiO 3 (STO) substrates but out-of plane on LaAlO 3(LAO) substrates [16,17]. Strain effect has also been found to play a critical role in the electron transport properties via growing LSMO on various perovskites, including STO, LAO, DyScO 3 , and NdGaO 3 [18,19]. Furthermore, the magnetic and electron transport properties of the LSMO films are also shown to be highly dependent on the growth condition such as the oxygen pressure [11,12]. As single terraces of ferromagnetic films with desired spin structures have the potential to create future spintronics devices, the atomic level control of the magnetic oxide thin films with wide atomic terraces is emergent. However, in previous reports, the terraces of these LSMO films are only several hundred nanometers wide [12,15] and the study of epitaxial LSMO films with micrometer wide atomic terraces has been lacking.In this letter, we report the growth of LSMO films with extraordinarily wide atomic terraces of more than 2 µm on STO (100) intensity shows a minimum value, which indicates the growth of an half ML LSMO film. Then the RHEED intensity starts to increase and reaches a maximum value at ~249 seconds and this indicates the growth of a full ML film. At ~1820 seconds, the shutter is closed and the measurement of the RHEED intensity is stopped. The total 10 peaks of the RHEED intensity oscillation curve indicate the growth of exact 10 MLs LSMO film on the top of the STO substrate. After the growth, the RHEED pattern of the 10 MLs LSMO film at 700 °C is shown in figure 1d. The RHEED pattern is very sharp and streaky, indicati...