2022
DOI: 10.1007/s11664-022-09615-6
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Optimization with Taguchi Approach to Prepare Pure TiO2 Thin Films for Future Gas Sensor Application

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Cited by 16 publications
(13 citation statements)
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“…The conductivity is a very curial parameter in the performance of gas sensor (high conductivity = high response to gas). [48] We noticed from Table 2, that the resistance and resistivity decrease with increasing of deposition temperature, in front of an increment of Mn 3 O 4 conductivity. This behavior is remarked on several material deposited at different temperatures such as, CZTS [51] and WO 3 .…”
Section: Electrical Propertiesmentioning
confidence: 79%
See 1 more Smart Citation
“…The conductivity is a very curial parameter in the performance of gas sensor (high conductivity = high response to gas). [48] We noticed from Table 2, that the resistance and resistivity decrease with increasing of deposition temperature, in front of an increment of Mn 3 O 4 conductivity. This behavior is remarked on several material deposited at different temperatures such as, CZTS [51] and WO 3 .…”
Section: Electrical Propertiesmentioning
confidence: 79%
“…The resistivity and conductivity of Mn 3 O 4 thin layers investigated have been calculated using the equations from our previous work. [48] The electrical properties show that all our samples have the electrical resistivity in an order to 100 Ω.cm. A similar value of the electrical resistivity for Mn 3 O 4 are reported by M. R. Belkhedkar [49] and by M. S. Anwar et al [50] Table 2 shows the electrical resistance, resistivity and conductivity depending deposition temperature.…”
Section: Electrical Propertiesmentioning
confidence: 81%
“…where D is the crystallite size, λ is the X-ray wavelength of Cu which is 0.15406 nm, θ is the angle of X-ray diffraction, A means the anatase phase of TiO 2 and β is the full width at half maximum (FWHM) of the peak. The micro-strain (ε) was calculated by the following equation [29] :…”
Section: Structural Propertiesmentioning
confidence: 99%
“…The dislocation density (δ) is a micro-structural parameter displays discontinuity and can be seen as a quantum of elemental deformation within a crystal. [29] It is written by…”
Section: Structural Propertiesmentioning
confidence: 99%
“…8,9 SMOs are specifically considered due to their low fabrication cost, simple operating principles, miniaturized size, portability, low power consumption, withstanding high chemical environments, high durability, and reproducibility. 7 Binary metal oxide thin films, such as SnO 2 , ZnO, TiO 2 , and Co 3 O 4 , [10][11][12][13][14][15][16][17][18][19][20][21][22] are good candidates for gas sensing application. However, the higher operating temperature, crossselectivity, and reversibility issues hinder the binary metal oxide gas sensors from large-scale applications.…”
mentioning
confidence: 99%