2004
DOI: 10.1078/0030-4026-00369
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Optimization of white light interferometry on rough surfaces based on error analysis

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Cited by 27 publications
(12 citation statements)
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References 8 publications
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“…The design of the displacement sensor is similar to previous extrinsic fiber optic interferometric sensors based on the gap formed between the cleaved endfaces of two optical fibers [1,[4][5][6][7]. As shown in Figure 1, the sensor is fabricated by aligning the collimated output of a graded-index (GRIN) lens mounted on the end of an optical fiber at 90º to a reflective target surface [1].…”
Section: Measurement Principlementioning
confidence: 99%
“…The design of the displacement sensor is similar to previous extrinsic fiber optic interferometric sensors based on the gap formed between the cleaved endfaces of two optical fibers [1,[4][5][6][7]. As shown in Figure 1, the sensor is fabricated by aligning the collimated output of a graded-index (GRIN) lens mounted on the end of an optical fiber at 90º to a reflective target surface [1].…”
Section: Measurement Principlementioning
confidence: 99%
“…It was found that, with increasing wavelengths, the average speckle size increases. It is known that light source selection using rough surface illumination is crucial when especially high accuracy roughness measurements are required [18]. It is therefore important to establish an extensive relationship between the wavelength, speckle size and roughness.…”
Section: Discussionmentioning
confidence: 99%
“…mechanical parts with sudden and very step changes in their form) and, (c) before splitting the COP, some of ones were severely corrupted with random noise in order to simulated the speckle noise produced by the surface roughness. 2 The Matlab function "randn" was used to produce the random noise. In order to simulate surface roughness, this function was applied to generate arrays of random numbers whose elements are normally distributed with mean 0 and standard deviation σ=0.2 µm.…”
Section: Evaluation Of the Aligning And Stitching Algorithmmentioning
confidence: 99%