Optimization of wear–corrosion properties of a–C:N films using filtered cathodic arc deposition

Tan, A.H.; Cheng, Yu‐Che

doi:10.1016/j.diamond.2007.10.018

Cited by 9 publications

(10 citation statements)

References 35 publications

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“…Although the friction of the PtN-DLC film (20 W) should decrease with its promoted graphitization (Fig. 5), the increased friction of the PtN-DLC film clearly indicates that the influence of graphitization on the friction of the PtN-DLC film is not significant probably due to the stronger effect of incorporated Pt because the incorporation of Pt promotes the wear of the PtN-DLC film by degrading the sp 3 -bonded cross-linking structure of the film [4,5,9,23,24]. In addition, the lower elastic modulus of incorporated Pt aggregates and the larger number of sp 2 bonds in the PtN-DLC film can result in the larger contact between the steel ball and film, and give rise to the higher friction of the film via the higher interfacial shear strength between the steel ball ball and film [4,5,9].…”

Section: Resultsmentioning

confidence: 99%

“…9. The reason is that the degraded sp 3 -bonded cross-linking structure of the PtN-DLC film associated with the incorporation of Pt is responsible for the reduced wear resistance of the film [4,5,9,23,24]. In addition, the wear width and depth of the PtN-DLC films further increase to about 165.4 and 0.45 μm, respectively, with further increased RF power applied to the Pt target to 60 W, indicating that the increased Pt content in the PtN-DLC films decreases the wear resistance of the films.…”

Section: Resultsmentioning

confidence: 99%

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Effects of platinum content on tribological properties of platinum/nitrogen doped diamond-like carbon thin films deposited via magnetron sputtering

Khun

Liu

2014

Friction

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Platinum (Pt) and nitrogen (N) were co-incorporated in diamond-like carbon (DLC) thin films using a magnetron sputtering system to form PtN-DLC thin films for tribological applications. The Pt content in the PtN-DLC films prepared on Si substrates was controlled by varying RF power applied to a Pt target at a fixed N 2 flow rate. The tribological properties of the PtN-DLC films were investigated with respect to the Pt content in the films. The uncoated Si substrate surface tested against a steel ball of 6 mm in diameter had significant abrasive and fatigue wear, while no significant wear was found on the N-DLC coated sample surface, indicating that the N-DLC film effectively prevented its underlying Si substrate from wear. However, the incorporation of Pt in the N-DLC films reduced the wear resistance of the films by degrading sp 3 -bonded cross-linking structures of the films so that significant wear tracks were found on the surfaces of the PtN-DLC films. Therefore, the increased radio frequency (RF) power applied to the Pt target decreased the wear resistance of the PtN-DLC films as a result of the increased Pt content.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

Effects of platinum content on tribological properties of platinum/nitrogen doped diamond-like carbon thin films deposited via magnetron sputtering

Khun

Liu

2014

Friction

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“…This experimental result is consistent with Tan and Cheng's study. 21 Figure 9 shows the heater power dependence of the Raman I d /I g ratio of the C 2 H 2 and C 2 H 4 source gas DLC films. The I d /I g ratio of the films increased gently with increasing heater power, owing to the structural changes, such as the decrease in sp3/sp2 ratio.…”

Section: Effects Of Source Gas Dlc Filmsmentioning

confidence: 99%

Characterisation and microcorrosion of DLC ultrathin films with acetylene and ethylene source gases by PECVD

Chen

Tan

2011

Surface Engineering

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Diamond like carbon (DLC) films were deposited by plasma enhanced chemical vapour deposition, whose purpose is in the application of the films to further improve read/write durability of next generation recording discs. The effects of acetylene (C 2 H 2 ) and ethylene (C 2 H 4 ) source gases and deposition parameters on roughness, structure, hardness, resistivity, silicone contamination, glide performance and microcorrosion measurement on the cobalt concentration of DLC films are studied utilising the following equipment: AFM, Raman, nanoindenter, resistivity gauge meter, phase metrics, time of flight SIMS and inductively coupled plasma mass spectroscopy. Results show that the Raman I d /I g ratio, G and D peak wavenumber, hardness, glide noise and avalanche, silicone contamination and cobalt concentration of the C 2 H 4 source gas films are significantly lower than those of C 2 H 2 gas. Diamond like carbon films prepared at the higher gas flow exhibit a lower I d /I g and cobalt concentration. Films deposited with a higher voltage bias and heater power will induce a higher I d /I g and cobalt concentration.

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“…Further discussion of the results of these experiments will be provided in the following. The purpose of this work was to deposit thin films on D263T glass substrate under various process parameters to tune the properties of the thin films by using the Taguchi method, wherein the only estimation standard for steadiness and robustness was to determine a variance index identified as the signal to noise ratio (S/N) [18][19][20][21][22]. Moreover, a lesser number of experiments are desired in the sputtering process when using the Taguchi method.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer

Lin

Chang

2013

International Journal of Photoenergy

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This study intends to deposit high transmittance diamond-like carbon (DLC) thin films on D263T glass substrate at room temperature via a diamond powder target using the radio frequency (RF) magnetron sputtering technique. Moreover, various process parameters were used to tune the properties of the thin films by using the Taguchi method. Experimental results show that the content of sp3bonded carbon decreases in accordance with the effect of the substrate temperature. In addition, the hardness of all as-deposited single-layer DLC films ranges from 13.2 to 22.5 GPa, and the RMS surface roughness was improved significantly with the decrease in sputtering pressure. The water repellent of the deposited DLC films improved significantly with the increase of the sp3content, and its contact angle was larger than that of the noncoated one by 1.45 times. Furthermore, the refraction index (n) of all as-deposited DLC films ranges from 1.95 to 2.1 atλ= 600 nm. These results demonstrate that the thickness increased as the reflectance increased. DLC film under an RF power of 150 W possesses high transmissive ability (>81%) and low average reflectance ability (<9.5%) in the visible wavelengths (atλ= 400–700 nm).

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Optimization of wear–corrosion properties of a–C:N films using filtered cathodic arc deposition

Cited by 9 publications

References 35 publications

Effects of platinum content on tribological properties of platinum/nitrogen doped diamond-like carbon thin films deposited via magnetron sputtering

Effects of platinum content on tribological properties of platinum/nitrogen doped diamond-like carbon thin films deposited via magnetron sputtering

Characterisation and microcorrosion of DLC ultrathin films with acetylene and ethylene source gases by PECVD

Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer

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