Optimization of the Ion Source Parameters to Change the Proportion of Single and Molecular Ions in Plasma

Kawamura, Masamitsu; Yamamoto, Tetusro; Kuwata, Yusuke; Sakai, Shigeki; Hamamoto, Nariaki

doi:10.1109/iit.2018.8807948

2018 22nd International Conference on Ion Implantation Technology (IIT) 2018

DOI: 10.1109/iit.2018.8807948

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Optimization of the Ion Source Parameters to Change the Proportion of Single and Molecular Ions in Plasma

Masamitsu Kawamura

Tetusro Yamamoto

Yusuke Kuwata

et al.

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Optimization of the Ion Source Parameters to Change the Proportion of Single and Molecular Ions in Plasma

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