Optimization of the Geometry of a Microelectromechanical System Testing Device for SiO2—Polysilicon Interface Characterization

Calegaro, Daniel; Mariani, Stefano; Merli, Massimiliano; Ferrari, Giacomo

doi:10.3390/ecsa-10-16033

Ecsa 2023 2023

DOI: 10.3390/ecsa-10-16033

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Optimization of the Geometry of a Microelectromechanical System Testing Device for SiO2—Polysilicon Interface Characterization

Daniel Calegaro,

Stefano Mariani,

Massimiliano Merli

et al.

Abstract: This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https:// creativecommons.org/licenses/by/ 4.0/).

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Optimization of the Geometry of a Microelectromechanical System Testing Device for SiO2—Polysilicon Interface Characterization

Abstract: This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https:// creativecommons.org/licenses/by/ 4.0/).

Cited by 0 publications

References 41 publications

No citations

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