Optimization of synthesis of the solid solution, Pb(Zr_1–xTi_x)O₃ on a single substrate using a high-throughput modified molecular-beam epitaxy technique

Abstract

Synthesis of Pb(Zr 1-x Ti x )O 3 (PZT) on a single substrate using a high-throughput molecular-beam epitaxy technique was demonstrated. In situ synthesis of crystalline PZT at elevated substrate temperatures could not be achieved, as reevaporation of Pb (PbO) occurred and the partial pressure of O 2 was insufficient to prevent formation of a PbPt x phase during deposition. Instead, ex situ postdeposition annealing was performed on PZT deposited at room temperature. Dense single phase PZT was prepared with a compositional range of 0.1 > x > 0.9, for film thicknesses up to 800 nm. Transmission electron microscopy revealed the grain size increased from 50 nm to $0.5 mm with increasing Zr-concentration and became more columnar. Raman, x-ray diffraction, and scanning electron microscopy/energy dispersive spectroscopy results revealed a morphotropic phase boundary between rhombohedral and tetragonal phases occurred at x $0.4 rather than at x = 0.47 in bulk ceramics. This was attributed to clamping arising from mismatch in thermal expansion between the film and substrate.

Strongly Enhanced Piezoelectric Response in Lead Zirconate Titanate Films with Vertically Aligned Columnar Grains

“…The physical methods include sputter deposition, 27−29 pulsed laser deposition (PLD), 30−33 molecular beam epitaxy (MBE), 34 and evaporation. 35,36 The chemical methods are metal–organic chemical vapor deposition, 37,38 plasma enhanced chemical vapor deposition, 39,40 and sol–gel processing.…”

ABO3 and A1−xCxB1−yDy(O1−zEz)3: review of experimental optimisation of thin film perovskites by high-throughput evaporative physical vapour deposition

“…This approach has been used for the last ten years to probe the relationship between composition, structure and key figures of merit of selected perovskites. As exemplified in this paper, perovskites used for piezoelectricity, such as PbxZryTi1-yO3-δ 77,78 and BixNd1-…”

“…B-site substitution studies have focussed on studying the PbxZryTi1-yO3-δ solid solution for piezoelectric materials 77,78 and LaxMnyNi1-yO3δ and SrxTi1-yFeyO3-δ as electrocatalysts. 4,5 Please do not adjust margins…”

“…The application of high-throughput thin film methodologies for the synthesis and study of perovskite materials was first developed using our approach for the study of piezoelectric materials such as lead zirconate -lead titanate with the exploration of the PbxZryTi1-yO3-δ solid solution. 77,78 These libraries were made by post deposition annealing to obtain the perovskite structure. Analysis of the crystal structure via deviation from Vegard's law (see Figure 5 top) combined with Raman spectroscopy revealed a transition at 36 at% Ti (with respect to Zr) between a tetragonal phase (Ti rich) to a rhombohedral one (Zr rich).…”

Thermodynamic properties of Pb2PtO4 and PbPt2O4 and phase equilibria in the system Pb–Pt–O

“…Anderson et al [1] have reported PbPt 2 O 4 formation at the interface between lead-zirconate-titanate (PZT) solid solution and Pt during PZT deposition using high-throughput modified molecular-beam epitaxy (MBE) technique. There are three known ternary oxides in the Pb-Pt-O system; Pb 2 Pt 2 O 6.5 , Pb 2 PtO 4 and PbPt 2 O 4 .…”