Optimization of stress induced bending in mems based suspensions

Haider, Muhammad Luqman; Ullah, Anayat; Ali, Babar; Ali, Haider

doi:10.1016/j.ijleo.2019.164048

Cited by 2 publications

(1 citation statement)

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“…Since most practical problems are difficult to obtain accurate solutions, finite element analysis not only has high calculation accuracy, but also can adapt to various complex shapes, thus it has become an effective engineering analysis method. Recently, it has been widely used in the design of filter [19][20][21][22][23], sensor [24][25][26][27][28][29], grating [16,18,[30][31][32], and so on. High diffraction efficiency at both TE polarization and TM polarization can be contented for the grating proposed in this paper.…”

Section: Introductionmentioning

confidence: 99%

Pencil-like periodic ridges under second Bragg incidence as dual-function beam separation

Lin

Wang

2021

Laser Phys.

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A reflective dual-function pencil-like grating under second Bragg incidence is proposed in this paper. The finite element analysis method is chosen to be the research technique of this grating. Based on it, the influence of the incident angle, period, duty cycle, incident wavelength, and other parameters on the diffraction efficiency are analyzed in detail. At an incident laser wavelength of 1.55 μm, for TE polarization, the efficiency of −2nd order is 96.57% so that the proposed grating can be regarded as a single-port high-efficiency reflective grating. For TM polarization, the grating can function as a dual-port grating with the efficiency 46.03% for 0th order and 45.96% for −2nd order. What is more, the proposed grating has a broader angular bandwidth compared with other dual-function gratings, which ensures the diffraction performance of the grating while allowing some operational changes.

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