Abstract:Here, we report an efficient approach to optimize the performance of surface enhanced Raman scattering (SERS) substrate. The geometry of the SERS substrate consists of the Au film deposited on polymer grating. The SERS substrate were fabricated by the laser interference lithography (LIL) and magnetron sputtering of Au thin films. The effect of the Au thin film prepared by magnetron sputtering at different deposition time (5-180 s) and operated pressure (3-5 mTorr). The morphology of the obtained samples was ob… Show more
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