2023
DOI: 10.1038/s41598-023-31003-1
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Optimization of shadow evaporation and oxidation for reproducible quantum Josephson junction circuits

Abstract: The most commonly used physical realization of superconducting qubits for quantum circuits is a transmon. There are a number of superconducting quantum circuits applications, where Josephson junction critical current reproducibility over a chip is crucial. Here, we report on a robust chip scale Al/AlOx/Al junctions fabrication method due to comprehensive study of shadow evaporation and oxidation steps. We experimentally demonstrate the evidence of optimal Josephson junction electrodes thickness, deposition rat… Show more

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Cited by 9 publications
(5 citation statements)
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“…Secondly, the JJ fabrication process: Place the sample in the coating machine, in the position of the first evaporation angle (θ 1 = + 54°), then begin coating the lower Al film (thickness = 100 nm). The AlO x layer was obtained by oxidising the top of the first Al film in pure oxygen at a pressure of 3.2 mbar for 10 min 89 . Then, switch the sample position to the second evaporation angle (θ 2 = − 54°) and start coating the upper Al film (thickness = 120 nm), as shown in Fig.…”
Section: Methodsmentioning
confidence: 99%
“…Secondly, the JJ fabrication process: Place the sample in the coating machine, in the position of the first evaporation angle (θ 1 = + 54°), then begin coating the lower Al film (thickness = 100 nm). The AlO x layer was obtained by oxidising the top of the first Al film in pure oxygen at a pressure of 3.2 mbar for 10 min 89 . Then, switch the sample position to the second evaporation angle (θ 2 = − 54°) and start coating the upper Al film (thickness = 120 nm), as shown in Fig.…”
Section: Methodsmentioning
confidence: 99%
“…Three qubits on the chip have the leads fabricated together with the SQUID loop using lift-off process as in Ref. 42 , 43 . The leads of the other three qubits were patterned using optical lithography and then wet-etched together with the capacitor pads.…”
Section: Resultsmentioning
confidence: 99%
“…Also, the roughness strongly depends on the deposition rate. The oxidation process affects the barrier properties as well; perhaps with dynamic oxidation [ 26 ] (with constant pumping) one can try to achieve better results.…”
Section: Resultsmentioning
confidence: 99%