Optimization of RF Frequencies in Dual-Frequency Capacitively Coupled Plasma Apparatus Using Genetic Algorithm (GA) and Plasma Simulation

Takagi, Shigeyuki; Nakaegawa, Tatsuhiro; Hsiao, S.N.; Sekine, Makoto

doi:10.1109/tsm.2023.3282566

IEEE Trans. Semicond. Manufact.

2023

DOI: 10.1109/tsm.2023.3282566

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Optimization of RF Frequencies in Dual-Frequency Capacitively Coupled Plasma Apparatus Using Genetic Algorithm (GA) and Plasma Simulation

Shigeyuki Takagi

Tatsuhiro Nakaegawa²,

S.N. Hsiao

et al.

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Optimization of RF Frequencies in Dual-Frequency Capacitively Coupled Plasma Apparatus Using Genetic Algorithm (GA) and Plasma Simulation

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References 17 publications

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