2012
DOI: 10.1016/j.ultramic.2012.01.014
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Optimization of Q-factor of AFM cantilevers using genetic algorithms

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Cited by 15 publications
(5 citation statements)
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“…A high Q ‐value enables high probe sensitivity and image resolution. [ 20 ] Probes with resonance frequency from 35 kHz to 1.41 MHz were obtained by varying the cantilever length. Such cantilever length alteration requires a modification to the mask design for patterning the backside of the wafer, according to Equation (2).…”
Section: Resultsmentioning
confidence: 99%
“…A high Q ‐value enables high probe sensitivity and image resolution. [ 20 ] Probes with resonance frequency from 35 kHz to 1.41 MHz were obtained by varying the cantilever length. Such cantilever length alteration requires a modification to the mask design for patterning the backside of the wafer, according to Equation (2).…”
Section: Resultsmentioning
confidence: 99%
“…The Q factor of an atomic force microscopy cantilever in ultra-high vacuum is of the order 10 3 to 10 4 in the 10-100 MHz range [18]. The Q factor is much lower at regular atmospheric pressure, being of the order 10 2 in the 5-50 kHz range [19]. These values, however, cannot be treated as indicative of the energy recovery potential of a realistic mechanical logic device since the logic gates themselves are neither perfectly rigid nor perfectly elastic, and will probably have significantly lower Q factors than purpose-built cantilevers.…”
Section: Introductionmentioning
confidence: 99%
“…The Q factor of an atomic force microscopy cantilever in ultra-high vacuum is of the order 10 3 to 10 4 in the 10-100 MHz range [17]. The Q factor is much lower at regular atmospheric pressure, being of the order 10 2 in the 5-50 kHz range [18]. These values, however, cannot be treated as indicative of the energy recovery potential of a realistic mechanical logic device since the logic gates themselves are neither perfectly rigid nor perfectly elastic, and will probably have significantly lower Q factors than purpose-built cantilevers.…”
Section: Introductionmentioning
confidence: 99%