Optimization of pulsed laser atom probe (PLAP) for the analysis of nanocomposite Ti–Si–N films

Tang, Feng; Gault, Baptiste; Ringer, Simon P.; Cairney, Julie M.

doi:10.1016/j.ultramic.2010.03.003

Cited by 65 publications

(59 citation statements)

References 34 publications

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“…Access to this information enables in-depth investigation of the field evaporation behaviour [21,[27][28]. The histogram of the number of ions contained in each event, referred to as multiplicity, is plotted in Figure 3.…”

Section: Analysis Of Multiple Eventsmentioning

confidence: 99%

“…Furthermore, atom probe analyses of poorly conducting materials exhibits a high number of multiple events, where a single laser pulse induces detection of significantly more than a single ion per pulse [21]. Here, we report on the analysis of gallium antimonide across a wide range of experimental conditions, and investigate the field evaporation behaviour of this material in contrast to that of pure W and an Al-6XXX series alloy in order to optimise the accuracy of atom probe microanalysis of compound semiconductors.…”

Section: Introductionmentioning

confidence: 99%

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Some aspects of the field evaporation behaviour of GaSb

Müller¹,

Saxey²,

Smith³

et al. 2011

Ultramicroscopy

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Molecular or cluster ions are often observed in the atom probe microanalysis of III-V compound semiconductors. Here, in-depth data analysis of a series of experiments on GaSb reveals strong variations in the mass spectrum, cluster ion appearance and multiplicity of the detector-events with respect to the effective electric field at the specimen surface. These variations are discussed in comparison with Al 6XXX series alloys and pure W and it is proposed that they may originate from field-dissociation of molecular ions, which might contribute to compositional inaccuracies. Abstract 2

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Section: Analysis Of Multiple Eventsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Some aspects of the field evaporation behaviour of GaSb

Müller¹,

Saxey²,

Smith³

et al. 2011

Ultramicroscopy

View full text Add to dashboard Cite

show abstract

“…The detection efficiency is usually 30-60%, depending on instrument type, and it is the same for all elements, thus giving excellent compositional accuracy, without the need of standard samples and element specific calibration. In some cases, though, the accuracy of concentration measurements is significantly reduced, for example when analyzing carbides [1], nitrides [2], silicides [3] or semiconductors [4]. In the case of carbides, the main reason why the obtained carbon concentration is usually too low is the limited capability of the detector to register all ions resulting from the same pulse.…”

Section: Introductionmentioning

confidence: 99%

Reduction of multiple hits in atom probe tomography

et al. 2013

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The accuracy of compositional measurements using atom probe tomography is often reduced because some ions are not recorded when several ions hit the detector in close proximity to each other and within a very short time span. In some cases, for example in analysis of carbides, the multiple hits result in a preferential loss of certain elements, namely those elements that frequently field evaporate in bursts or as dissociating molecules. In this paper a method of reducing the effect of multiple hits is explored. A fine metal grid was mounted a few millimeters behind the local electrode, effectively functioning as a filter. This resulted in a decrease in the overall detection efficiency, from 37% to about 5%, but also in a decrease in the fraction of multiple hits. In an analysis of tungsten carbide the fraction of ions originating from multiple hits decreased from 46% to 10%. As a result, the measured carbon concentration increased from 48.2 at.% to 49.8 at.%, very close to the expected 50.0 at.%. The characteristics of the multiple hits were compared for analyses with and without the grid filter.

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“…The three main considerations for better analytical results are molecular ions, multiple events, and peak overlap. These issues often occur during carbide , nitride (Tang et al, 2010), silicide (Kinno et al, 2012) analysis compared to metallic materials since the evaporation of molecular ions and multiple events where more than one ion originating from the same pulse is detected. In cases where two or more types of ions have very similar mass-to-chargeratios, peaks can overlap.…”

Section: Peak Identificaion Of Mass Spectrum For Quantitative Apt Anamentioning

confidence: 99%

A Brief Comment on Atom Probe Tomography Applications

Seol

Kim

Park

2016

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Atom probe tomography is a time-of-flight mass spectrometry-based microanalysis technique based on the field evaporation of surface atoms of a tip-shaped specimen under an extremely high surface electric field. It enables three-dimensional characterization for deeper understanding of chemical nature in conductive materials at nanometer/ atomic level, because of its high depth and spatial resolutions and ppm-level sensitivity. Indeed, the technique has been widely used to investigate the elemental partitioning in the complex microstructures, the segregation of solute atoms to the boundaries, interfaces, and dislocations as well as following of the evolution of precipitation staring from the early stage of cluster formation to the final stage of the equilibrium precipitates. The current review article aims at giving a comment to first atom probe users regarding the limitation of the techniques, providing a brief perspective on how we correctly interprets atom probe data for targeted applications.

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Optimization of pulsed laser atom probe (PLAP) for the analysis of nanocomposite Ti–Si–N films

Cited by 65 publications

References 34 publications

Some aspects of the field evaporation behaviour of GaSb

Some aspects of the field evaporation behaviour of GaSb

Reduction of multiple hits in atom probe tomography

A Brief Comment on Atom Probe Tomography Applications

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