2008
DOI: 10.1366/000370208783412717
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Optimization of Principal-Component-Analysis-Applied in Situ Spectroscopy Data Using Neural Networks and Genetic Algorithms

Abstract: A new model of multidimensional in situ diagnostic data is presented. This was accomplished by combining a back-propagation neural network (BPNN), principal component analysis (PCA), and a genetic algorithm (GA). The PCA was used to reduce input dimensionality. The GA was applied to search for a set of optimized training factors involved in BPNN training. The presented technique was evaluated with optical emission spectroscopy (OES) data measured during the etching of oxide thin films in a CHF(3)-CF(4) inducti… Show more

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Cited by 20 publications
(7 citation statements)
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References 18 publications
(17 reference statements)
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“…As suggested above, an alternative could be to select PC in the CV procedure based on maximum prediction accuracy. In addition, more sophisticated techniques such as the combination of statistical methods like PCA, neural networks and genetic algorithms could be applied, as has already been tested in other fields [52]. However, a balance between benefits (e.g.…”
Section: Discussionmentioning
confidence: 99%
“…As suggested above, an alternative could be to select PC in the CV procedure based on maximum prediction accuracy. In addition, more sophisticated techniques such as the combination of statistical methods like PCA, neural networks and genetic algorithms could be applied, as has already been tested in other fields [52]. However, a balance between benefits (e.g.…”
Section: Discussionmentioning
confidence: 99%
“…예컨대, 소스전력의 감소에 따라 증착률 이 증가되거나 3) , 바이어스의 감소에 따른 굴절률의 증가 4 8) . 공정변수(소 스전력, 압력 등)와 박막특성(증착률, 식각률 등) 간 의 모델링외에, 신경망은 공정 중 수집되는 in-situ 정보와 박막특성간의 모델링, 예컨대 optical emission spectroscopy 데이터와 식각특성간의 모델 9) , 또는 x-ray photoelectron spectroscopy와 같은 박막표면진 단특성과 표면거칠기의 모델링에 10 A + a * E h + bE l 참고문헌…”
Section: 서 론unclassified
“…Valery et al (1995) developed a process model for dynamic responses, including power draw, grinding charge level, slurry level, and product size distribution for changes in feed rate, size and hardness, and water addition. Principal component analysis (PCA) and factor analysis (FA) for process monitoring and system diagnosis have been proposed for batch processes applications (Nomikos and MacGregor, 1995;Yoon and MacGregor, 2004;Kim and Kwon, 2008). They have been successfully used in the mining industry for analysing ventilation methane emissions and for constructing a prediction model for long-wall mines using artificial neural networks (Karacan, 2008).…”
Section: Introductionmentioning
confidence: 99%