“…First, to prevent damaging or quenching of the fluorescence signal via electron-beam irradiation, each FM field of view must be acquired prior to EM exposure. Second, to compensate for the reduced application of contrast agents, backscattered electron (BSE) collection efficiency is enhanced via a negative stage bias, allowing for higher throughput ( Bouwer et al, 2016 ; Lane et al, 2021 ). Finally, a high precision EM-FM overlay is facilitated by the use of cathodoluminescent (CL) points, which eliminates the need for artificial fiducial markers ( Haring et al, 2017 ).…”