Optimization of multi-step development scheme to improve the critical dimension uniformity

Chang, Hsien-an; Lin, B. N.; Hung, Kuei-Chun; Fang, Shu-Ping; Hsu, Te-shao

doi:10.1117/12.599321

SPIE Proceedings

2005

DOI: 10.1117/12.599321

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Optimization of multi-step development scheme to improve the critical dimension uniformity

Hsien-an Chang

B. N. Lin

Kuei-Chun Hung

et al.

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Optimization of multi-step development scheme to improve the critical dimension uniformity

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