2020
DOI: 10.1002/fuce.202000080
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Optimization of Material Contrast for Efficient FIB‐SEM Tomography of Solid Oxide Fuel Cells

Abstract: Focused ion beam (FIB)-scanning electron microscopy (SEM) serial sectioning tomography has become an important tool for three-dimensional microstructure reconstruction of solid oxide fuel cells (SOFC) to obtain an understanding of fabrication-related effects and SOFC performance. By sequential FIB milling and SEM imaging a stack of cross-section images across all functional SOFC layers was generated covering a large volume of 3.5Á10 4 μm 3. One crucial step is image segmentation where regions with different im… Show more

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Cited by 11 publications
(6 citation statements)
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References 36 publications
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“…Further information about the equipment can be found in Ref. 31. Three different cell layers become visible at this SEM image, namely the 3YSZ electrolyte 1 (cf.…”
Section: Methodsmentioning
confidence: 99%
“…Further information about the equipment can be found in Ref. 31. Three different cell layers become visible at this SEM image, namely the 3YSZ electrolyte 1 (cf.…”
Section: Methodsmentioning
confidence: 99%
“…Microstructures and related parameters of Ni-YSZ cermet fuel electrodes, YSZ based electrolytes as well as air electrodes were investigated. (4,(7)(8)(9)(10) Computed Tomography X-ray computed tomography enables the non-destructive investigation of a sample. Depending on the materials included in the sample, volumes in an order of magnitude of 10 6 μm 3 can be investigated.…”
Section: Focused Ion Beam Tomographymentioning
confidence: 99%
“…Different phases can be distinguished by brightness level in the gray-scale 2D crosssectional images obtained by FIB-SEM, typically in backscattered electron detector (BSED) mode. However, because of the image artifacts, such as inhomogeneous brightness, uneven cross-section, etc., the differentiation between different phases in the raw FIB-SEM images is not straightforward (5). Thus, precise phase segmentation is necessary before quantitative analysis and 3D reconstruction.…”
Section: Introductionmentioning
confidence: 99%