Optimization of Layer Transfer and Photolithography for Device Integration of 2D-TMDC
Amir Ghiami,
Tianyishan Sun,
Hleb Fiadziushkin
et al.
Abstract:Extensive research into two-dimensional transition metal dichalcogenides (2D-TMDCs) over the past decade has paved the way for the development of (opto)electronic devices with enhanced performance and novel capabilities. To realize devices based on 2D-TMDC layers, compatible and optimized technologies such as layer transfer and photolithography are required. Challenges arise due to the ultrathin, surface-only nature of 2D layers with weak van der Waals adhesion to their substrate. This might potentially compro… Show more
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