Optimization of Laser Micro/Nano Processing of Silicon and Quartz
Muaath J. Mahmoud,
Bassam G. Rasheed,
Muammel M. Hanon
Abstract:This research paper explores the application of three laser systems, namely the Nd:YAG laser, fiber laser, and CO2 laser, for the micro/nano machining of silicon and quartz materials. The experimental results demonstrate the successful formation of stable silicon nanoparticles with reduced dimensions. Additionally, a quartz sheet was utilized to create a microlens array. The laser microprocessing technique was enhanced through the implementation of design of experiments (DOE) analysis. A Box-Behnken design (BB… Show more
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