2020
DOI: 10.1088/1674-1056/ab631c
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Optimization of laser focused atomic deposition by channeling*

Abstract: Laser focused atomic deposition is a unique and effective way to fabricate highly accurate pitch standards in nanometrology. However, the stability and repeatability of the atom lithography fabrication process remains a challenging problem for massive production. Based on the atom–light interaction theory, channeling is utilized to improve the stability and repeatability. From the comparison of three kinds of atom–light interaction models, the optimal parameters for channeling are obtained based on simulation.… Show more

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Cited by 2 publications
(2 citation statements)
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“…To the best of our knowledge, such conditions have not yet been systematically explored despite continued interests in the problem. [20][21][22] For such investigations, in silico approaches based on accurate numerical simulations would be much more efficient. Adiabaticity is a key assumption in atom manipulation methods, so it is critical to examine whether the assumption is valid for a given set of experimental conditions.…”
Section: Introductionmentioning
confidence: 99%
“…To the best of our knowledge, such conditions have not yet been systematically explored despite continued interests in the problem. [20][21][22] For such investigations, in silico approaches based on accurate numerical simulations would be much more efficient. Adiabaticity is a key assumption in atom manipulation methods, so it is critical to examine whether the assumption is valid for a given set of experimental conditions.…”
Section: Introductionmentioning
confidence: 99%
“…[5−9] Those works are concentrated on the longitudinal field of light beams. Because the longitudinal energy is a benefit for particle acceleration, [10] fluorescent imaging, second-harmonic generation, [11,12] atomic deposition, [13] and Raman spectroscopy. [14] Furthermore, it has been practical to create a pure longitudinal light beam.…”
mentioning
confidence: 99%