Optimization of ITO thin film properties as a function of deposition time using the swanepoel method

Hacini, Abdelbaki; Ali, Ahmad Hadi; Adnan, Nurul Nadia

doi:10.1016/j.optmat.2021.111411

Cited by 14 publications

(10 citation statements)

References 33 publications

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“…The optical bandgap energy E g of ITO/Mo thin film was studied before and after laser annealing. The bandgap energy E g was determined using the following equation (Tauc relation) [28]: (3) where α is the absorption coefficient, hν is the photon energy; A is a constant, E g is the bandgap energy, n = 0.5 for a direct bandgap, and n = 2 for an indirect bandgap. The bandgap energy values of the ITO/Mo thin films were calculated and listed in Table 1.…”

Section: Resultsmentioning

confidence: 99%

“…Figure 1 shows the structural evolution for the as-deposited and the samples annealed with different laser energies. Most samples show a polycrystalline structure crystallized in a cubic structure (JCPDS:71-2194) [ 28 ]. However, the sample treated with 240 mJ shows an amorphous structure because of the high energy that diffuses gas atoms from the chamber into the surface [ 29 ].…”

Section: Resultsmentioning

confidence: 99%

“…The crystallite size ( D ) and the dislocation density (δ) were determined from the XRD peaks using the following equations [ 28 ]:…”

Section: Resultsmentioning

confidence: 99%

“…The optical bandgap energy E g of ITO/Mo thin film was studied before and after laser annealing. The bandgap energy E g was determined using the following equation (Tauc relation) [ 28 ]:…”

Section: Resultsmentioning

confidence: 99%

See 3 more Smart Citations

Electrical and optical enhancement of ITO/Mo bilayer thin films via laser annealing

Hacini¹,

Ali²,

Adnan³

et al. 2022

Beilstein J. Nanotechnol.

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ITO/Mo bilayer thin films were sputtered on n-type silicon and glass substrates and annealed with a Nd:YAG pulsed laser. The structural results show that both the as-deposited and the annealed ITO/Mo thin films have a polycrystalline structure, and that the annealing treatment enhanced the crystallinity of samples. Moreover, the XRD patterns exhibited a cubic structure preferentially oriented along the (222) and (400) planes. The AFM analysis shows that grain size and RMS roughness increased from 16.02 to 36.19 nm and 0.4 to 2.6 nm, respectively, when the laser energy was increased to 120 mJ. The as-deposited sample has an optical transmittance of nearly 80% in the 300–800 nm range. The laser annealing yielded a higher transmittance of 94% and increased the bandgap energy from 2.76 to 2.88 eV at 120 mJ. The annealing treatment decreased the resistivity from 15.63 × 10−4 to 1.73 × 10−4 Ω/cm−1. Additionally, the figure of merit of the ITO/Mo structure improved significantly from 6.63 × 10−4 Ω−1 of the as-deposited sample to 17.6 × 10−3 Ω−1 of the the annealed structure. The results indicate that the laser annealing could improve the efficiency of the transparent conductive layer, which can be potentially applied in optoelectronic devices.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

“…The crystallite size ( D ) and the dislocation density (δ) were determined from the XRD peaks using the following equations [ 28 ]:…”

Section: Resultsmentioning

confidence: 99%

“…The optical bandgap energy E g of ITO/Mo thin film was studied before and after laser annealing. The bandgap energy E g was determined using the following equation (Tauc relation) [ 28 ]:…”

Section: Resultsmentioning

confidence: 99%

See 2 more Smart Citations

Electrical and optical enhancement of ITO/Mo bilayer thin films via laser annealing

Hacini¹,

Ali²,

Adnan³

et al. 2022

Beilstein J. Nanotechnol.

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show abstract

“…DOI: https://doi.org/10.30970/jps.26.4402 Íàóêîâå çàöiêàâëåííÿ ïëiâêàìè IÒÎ ñòàáiëüíî âèñîêå. õ îòðèìóþòü ðiçíîìàíiòíèìè ìåòîäàìè, çîêðåìà åëåêòðîííî-ïðîìåíåâèì âèïàðîâóâàííÿì [4], òåð-ìi÷íèì âàêóóìíèì âèïàðîâóâàííÿì [5], ìàãíåòðîííèì ðîçïèëåííÿì íà ñòàëîìó ñòðóìi [6], iìïóëüñíèì ëàçåðíèì îñàäaeåííÿì [6], âèñîêî÷àñòîòíèì (Â×) ìàãíåòðîííèì ðîçïèëåííÿì [7], ðåàêòèâíèì ðîçïèëåí-íÿì [8], ñïðåé-ïiðîëiçîì [9], çîëü-ãåëü ìåòîäîì [10],…”

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Low-temperature technology for obtaining transparent ITO films with high conductivity

Turko¹,

Vasiliev²,

Eliyashevskyy³

et al. 2022

J. Phys. Stud.

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Influence of hydrogen doping of In2O3-based transparent conducting oxide films on silicon heterojunction solar cells

Park,

Hussain,

Park

et al. 2024

J Mater Sci

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Optimization of ITO thin film properties as a function of deposition time using the swanepoel method

Cited by 14 publications

References 33 publications

Electrical and optical enhancement of ITO/Mo bilayer thin films via laser annealing

Electrical and optical enhancement of ITO/Mo bilayer thin films via laser annealing

Low-temperature technology for obtaining transparent ITO films with high conductivity

Influence of hydrogen doping of In2O3-based transparent conducting oxide films on silicon heterojunction solar cells

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