Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering

Kuo, Shou‐Yi; Jeng, Ming–Jer; Chang, Liann‐Be; Lin, Wei‐Ting; Hu, Sung-Cheng; Lu, Yung-Tien; Wu, Ching-Wen

doi:10.1109/pvsc.2009.5411612

Cited by 4 publications

(2 citation statements)

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“…The stress could be changed from compressive to tensile by applying different deposition conditions. Kuo .e.t [3] pointed out that the trend of residue stress v.s. deposition power and pressure can be devided into three regions: when the working pressure is small or high enough, the residue stress become more compressive with the increase of pressure; between the two regions, tensile residue stress increases with higher pressure.…”

Section: Resultsmentioning

confidence: 99%

P‐47: Influences of Mo Film Residual Stress on Cu/Mo Interface and Undercut Performance

Meng²,

Sun³

et al. 2020

Symp Digest of Tech Papers

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The bilayer structure of Cu/Mo wires applied in TV panels has been suffering from the undercut issue after patterning ever since its commercialization. Most of the efforts focused on applying more expensive barrier layer materials or the long-time developing of etchant. In this paper, the influence of Mo residual stress on the undercut of Cu/Mo has been investigated. The results showed that by changing the Mo stress from tensile to compressive, the undercut has been improved to more than 50%, which is a promising solution for the issue.

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Section: Resultsmentioning

confidence: 99%

P‐47: Influences of Mo Film Residual Stress on Cu/Mo Interface and Undercut Performance

Meng²,

Sun³

et al. 2020

Symp Digest of Tech Papers

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“…Furthermore, Duchatelet et al noted the formation of a thinner MoO 2 layer on the Mo surface when using the thermal oxidation method, which leads to an effective reduction of the MoSe 2 film thickness [16]. The conductivity characteristics decrease as the oxygen content in the Mo film increases [17], which leads to a reduction in the sc of the solar cell. The stability of the solar cell decreases due to the high water solubility of the MoO 2 layer.…”

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confidence: 99%

Manipulation of MoSe₂Films on CuIn(Ga)Se₂Solar Cells during Rapid Thermal Process

Lin

Chan

Tseng

et al. 2014

International Journal of Photoenergy

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In this study, the CuIn(Ga)Se2(CIGS) crystalline quality and MoSe2thickness of films produced by the rapid thermal selenization process under various selenization pressures were investigated. When the selenization pressure increased from 48 Pa to 1.45 × 104 Pa, the CIGS films were smooth and uniform with large crystals of varying sizes. However, the MoSe2thicknesses increased from 50 nm to 2,109 nm, which created increased contact resistivity for the CIGS/MoSe2/Mo structures. The efficiency of CIGS solar cells could be increased from 1.43% to 4.62% due to improvement in the CIGS crystalline quality with increasing selenization pressure from 48 Pa to 1.02 × 103 Pa. In addition, the CIGS crystalline quality and MoSe2thickness were modified by the pressure released valve (PRV) selenization process method. The crystalline qualities of the CIGS films were similarly affected by the selenization pressure at 1.02 × 103 Pa in the PRV selenization method and the MoSe2thicknesses were reduced from 1,219 nm to 703 nm. A higher efficiency of 5.2% was achieved with the thinner MoSe2obtained by using the PRV selenization method.

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Glass cleaning and its effects on the damp-heat stability of molybdenum on soda-lime glass

Sundaramoorthy

Pern

Lazcano

et al. 2010

2010 35th IEEE Photovoltaic Specialists Conference

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Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering

Cited by 4 publications

References 6 publications

P‐47: Influences of Mo Film Residual Stress on Cu/Mo Interface and Undercut Performance

P‐47: Influences of Mo Film Residual Stress on Cu/Mo Interface and Undercut Performance

Manipulation of MoSe₂Films on CuIn(Ga)Se₂Solar Cells during Rapid Thermal Process

Glass cleaning and its effects on the damp-heat stability of molybdenum on soda-lime glass

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Optimization of growth parameters for improved adhesion and electricity of molybdenum films deposited by RF magnetron sputtering

Cited by 4 publications

References 6 publications

P‐47: Influences of Mo Film Residual Stress on Cu/Mo Interface and Undercut Performance

P‐47: Influences of Mo Film Residual Stress on Cu/Mo Interface and Undercut Performance

Manipulation of MoSe2Films on CuIn(Ga)Se2Solar Cells during Rapid Thermal Process

Glass cleaning and its effects on the damp-heat stability of molybdenum on soda-lime glass

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Product

Resources

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Manipulation of MoSe₂Films on CuIn(Ga)Se₂Solar Cells during Rapid Thermal Process