Optimization of Graphene Layers Grown on Pt/Ti/SiO₂ by Hot Filament Chemical Vapor Deposition

Abstract

Large area single and bilayer graphene are grown on Pt/Ti/SiO2 substrates by hot filament chemical vapor deposition (HFCVD) with and without the assistance of Cu foil. The quality and number of graphene layers deposited on the substrate are assessed by Raman Spectroscopy. Atomic Force Microscopy (AFM) is used for assessing the surface topography of the graphene films grown on the Pt/Ti/SiO2 substrates. The microstructure and elemental analyses are performed by Scanning Electron Microscopy (SEM) and Energy Dispersive Spectroscopy (EDS). The results show that bilayer graphene growth is facilitated by a copper foil placed nearby Pt/Ti/SiO2 substrate and by a high filament temperature in the HFCVD reactor. Monolayer graphene grows only when no copper foil is placed near the Pt/Ti/SiO2 substrate at a low filament temperature. The approach paves a novel pathway towards the layer‐controlled growth of graphene on Pt/Ti/SiO2 substrates by HFCVD for frontier applications.