2022
DOI: 10.3390/mi13101563
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Optimization of Electrode Patterns for an ITO-Based Digital Microfluidic through the Finite Element Simulation

Abstract: Indium tin oxide (ITO)-based digital microfluidics (DMF) with unique optical and electrical properties are promising in the development of integrated, automatic and portable analytical systems. The fabrication technique using laser direct etching (LDE) on ITO glass has the advantages of being rapid, low cost and convenient. However, the fabrication resolution of LDE limits the minimum line width for patterns on ITO glasses, leading to a related wider lead wire for the actuating electrodes of DMF compared with … Show more

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Cited by 4 publications
(5 citation statements)
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References 32 publications
(32 reference statements)
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“…The electrodes were directly etched onto the bottom plate (52 mm x 50 mm) using a UV laser operating at a wavelength of 355 nm and a pulse duration of 20 μs. 45 Then, the glass plates were cleaned with ethanol for 10 minutes to remove residual material and exposed to plasma treatment for 1 minute. Following the application of a vacuum -deposited Parylene C film (~2 µm thick) onto the bottom plate surface as a dielectric layer, CYTOP films were spin-coated (2000rpm, 30s) onto both the top and bottom plates to serve as hydrophobic layers.…”
Section: Chip Fabricationmentioning
confidence: 99%
See 1 more Smart Citation
“…The electrodes were directly etched onto the bottom plate (52 mm x 50 mm) using a UV laser operating at a wavelength of 355 nm and a pulse duration of 20 μs. 45 Then, the glass plates were cleaned with ethanol for 10 minutes to remove residual material and exposed to plasma treatment for 1 minute. Following the application of a vacuum -deposited Parylene C film (~2 µm thick) onto the bottom plate surface as a dielectric layer, CYTOP films were spin-coated (2000rpm, 30s) onto both the top and bottom plates to serve as hydrophobic layers.…”
Section: Chip Fabricationmentioning
confidence: 99%
“…The electrodes were directly etched onto the bottom plate (52 mm x 50 mm) using a UV laser operating at a wavelength of 355 nm and a pulse duration of 20 μs. 45 Then, the glass plates were cleaned with ethanol for 10 minutes to remove residual material and preprint (which was not certified by peer review) is the author/funder. All rights reserved.…”
Section: Chip Fabricationmentioning
confidence: 99%
“…The electrodes were directly etched onto the bottom plate (52 mm x 50 mm) using a UV laser operating at a wavelength of 355 nm and a pulse duration of 20 µs. 47 Then, the glass plates were cleaned with ethanol for 10 minutes to remove residual material and exposed to plasma treatment for 1 minute. Following the application of a vacuum-deposited Parylene C lm (~ 2 µm thick) onto the bottom plate surface as a dielectric layer, CYTOP lms were spin-coated (2000rpm, 30s) onto both the top and bottom plates to serve as hydrophobic layers.…”
Section: Chip Fabricationmentioning
confidence: 99%
“…Coatings 2024, 14, 178 3 of 16 potentially interesting technical decision for microfluidics applications (as an alternative to ITO with UV treatment [45], patterned ITO [46], or ITO coated on a PET film [47]).…”
Section: Introductionmentioning
confidence: 99%