Optimization of design and fabrication for micromachined true time delay (TTD) phase shifters

Palei, W.; Liu, A.Q.; Yu, An; Alphones, A.; Lee, Yee Hui

doi:10.1016/j.sna.2004.10.006

Cited by 13 publications

(7 citation statements)

References 6 publications

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“…Hence x b is generally kept 2-3 times of the maximum operating frequency. The Bragg frequency is given by (Barker and Rebeiz 1998;Palei et al 2005):…”

Section: Rf Design and Modellingmentioning

confidence: 99%

“…In DMTL phase shifters small phase shift can be achieved with high accuracy. Demonstrated DMTL phase shifters on fused silica (McFeetors and Okoniewski 2006), high resistivity silicon (Palei et al 2005;Lakshminarayan and Weller 2002), low resistivity silicon (Wang et al 2008;Guo et al 2006), or ceramic substrates such as quartz (Hayden and Rebeiz 2003Weller 2007, 2006; Rebeiz 2000, 1998;Fangmin et al 2001), Pyrex glass Borgioli et al 2000;Topalli et al 2006), use highly sophisticated and expensive silicon microfabrication process technologies. RF devices have also been demonstrated with several non-conventional processes on microwave laminates with emphasis on the performance improvement in insertion loss at the cost of fabrication complexity (Ramadoss et al 2005).…”

Section: Introductionmentioning

confidence: 99%

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A low cost approach for the fabrication of microwave phase shifter on laminates

Goel

Vinoy

2011

Microsyst Technol

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This paper presents a simple and low cost fabrication approach using extended printed circuit board processing techniques for an electrostatically actuated phase shifter on a common microwave laminate. This approach uses 15 lm thin copper foils for realizing the bridge structures as well as for a spacer. A polymeric thin film deposited by spin coating and patterned using lithographic process is used as a dielectric layer to improve the reliability of the device. The prototype of the phase shifter for X-band operation is fabricated and tested for electrical and electromechanical performance parameters. The realized devices have a figure of merit of 70°/dB for a maximum applied bias potential of 85 V. Since these phase shifters can be conveniently fabricated directly on microwave substrates used for feed distribution networks of phased arrays, the overall addition in cost, dimensions and processing for including these phase shifters in these arrays is minimal.

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“…Hence x b is generally kept 2-3 times of the maximum operating frequency. The Bragg frequency is given by (Barker and Rebeiz 1998;Palei et al 2005):…”

Section: Rf Design and Modellingmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

A low cost approach for the fabrication of microwave phase shifter on laminates

Goel

Vinoy

2011

Microsyst Technol

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“…The equivalent model, i.e., Fig. 2(c) based on extracted/calculated electronic components for analysing DMTL devices is generally acceptable and has been used in most previous publications [13]- [21]. The equivalent model of the unloaded DMTL has been built and the simulated S-parameters will be shown in the Section III.…”

Section: A Design and Modelingmentioning

confidence: 99%

“…Barker and Rebeiz [12] demonstrated a distributed MEMS transmission line (DMTL) phase shifter using MEMS capacitive switches. After their work, much effort has been directed on design, modification, and fabrication of DMTLs [13]- [21] for communication applications. Since the distributed transmission lines are classical slow-wave multiple resonant structures, which induces higher interaction between sensors and MUT, they are suitable to construct very sensitive biosensors.…”

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confidence: 99%

Flip-Chip Distributed MEMS Transmission Lines (DMTLs) for Biosensing Applications

Uttamchandani

2009

IEEE Trans. Ind. Electron.

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“…switches. 16 However, due to the limited control range of the bridge traveling distance (or say beam defection) before the bridge pull-in, analog phase shifters show relatively small phase shifts. Digital MEMS phase shifters are generally categorized into four basic types: reflected type, 17 switched line, 18 loaded line, 19 and distributed MEMS transmission line (DMTL).…”

mentioning

confidence: 99%

A low‐loss compact six‐bit DMTL phase shifter for phased array antenna applications

Teymoori

Dousti

Afrang

2020

Circuit Theory & Apps

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A phase shifter is one of the main components of radars and phased array systems. In this paper, a novel three-state two-bridge unit cell is presented for a compact low-loss six-bit distributed microelectromechanical systems (MEMS) transmission line (DMTL) phase shifter. The proposed unit cell includes a coplanar waveguide (CPW) transmission line, a MEMS bridge on the signal line, two metal-air-metal (MAM) capacitors on a glass substrate, and two additional electrodes under the MEMS bridge, near the signal line. Using these electrodes, it is possible to generate two different phase states employing the MEMS bridge, and the third state is produced by a metal-air-metal (MAM) bridge. Hence, the designed structure can generate three different phase shifts per unit cell (i.e., 5.625 , 11.25 , and 22.5 phase shifts). The novelty of this design is that the number of unit cells is considerably reduced from 64 in a conventional six-bit phase shifter to only 17 in our design. Therefore, the total length of the six-bit phase shifter and average loss are considerably reduced. The designed structure is calculated and simulated at 32 GHz using MATLAB and ANSOFT HFSS, respectively. According to the calculation and simulation results, the lateral size of the phase shifter is only 8.5 mm, the root mean square (RMS) phase error is 1.38 , and the average loss is 1.1 dB. The feasibility of the proposed design is investigated using the proposed fabrication process. The designed phase shifter can be easily scaled to other frequencies for radar and satellite applications with more bits. K E Y W O R D S DMTL phase shifter, phased array antennas, return loss, unit cell 1 | INTRODUCTION Radio frequency (RF) microelectromechanical systems (MEMS) as a new interesting area in MEMS technology enable us to design and use high-performance devices and systems for broadband communication applications. 1-3 In recent years, nano-electromechanical systems (NEMS) have also developed and have found some new applications. 4-10 RF MEMS-based devices include switches, inductors, capacitors, varactors, and phase shifters. Phase shifters are the main components of the phased array antennas for radar applications and are classified into analog and digital types. 11-14 Analog MEMS phase shifters change the phase from 0 to 360 continuously, and their structure contains MEMS varactors. 15 Digital MEMS phase shifters contain only a discrete set of phase shifts and usually employ MEMS

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Optimization of design and fabrication for micromachined true time delay (TTD) phase shifters

Cited by 13 publications

References 6 publications

A low cost approach for the fabrication of microwave phase shifter on laminates

A low cost approach for the fabrication of microwave phase shifter on laminates

Flip-Chip Distributed MEMS Transmission Lines (DMTLs) for Biosensing Applications

A low‐loss compact six‐bit DMTL phase shifter for phased array antenna applications

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