Optimization of DC Reactive Magnetron Sputtering Deposition Process for Efficient YSZ Electrolyte Thin Film SOFC

Hidalgo, Hervé; Thomann, Anne-Lise; Lecas, Thomas; Vulliet, Julien; Wittmann-Ténèze, K.; Damiani, David; Millon, Éric; Brault, Pascal

doi:10.1002/fuce.201200125

Cited by 26 publications

(8 citation statements)

References 27 publications

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“…The results are illustrated in Figure 4 (a)-(c) from which it apparent that full integrity of the structure was retained with no changes in morphology nor any discernible separation of the anode from the underlying electrolyte. In passing we note that others have previously used magnetron sputtering to deposit YSZ electrolyte films on commercial Ni-YSZ anodes-in effect the inverse of what we report here [21][22]. It was found that the thin film electrolyte/commercial anode interfaces maintained their structures under operating condition; note however that our systems are more complex and in principle more demanding in that they involve the deposition and subsequent processing of a ternary Y-Zr-Ni system.…”

Section: Resultssupporting

confidence: 56%

Porous, robust highly conducting Ni-YSZ thin film anodes prepared by magnetron sputtering at oblique angles for application as anodes and buffer layers in solid oxide fuel cells

García‐García

Yubero

González‐Elipe

et al. 2015

International Journal of Hydrogen Energy

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a b s t r a c tPolyactive ® membranes show promising properties for CO 2 separation from flue gas. An investigation of different module types using Polyactive ® membranes was carried out for this paper. A test rig was built to explore, amongst other process parameters, the pressure drop in envelope-type membrane modules. The experimental data and simulation results were compared with quite good consistency. This validation enabled further simulations for different modules in a virtual pilot plant configuration. Applying the data from the pilot plant simulation to a reference power plant, the scaled-up cascaded membrane system was analyzed using different membrane modules. Considering the required membrane area, energy consumption and pressure drop in different modules, a counter-current membrane module configuration exhibited the best performance and had a marginal advantage in comparison with the chemical absorption process.

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Section: Resultssupporting

confidence: 56%

Porous, robust highly conducting Ni-YSZ thin film anodes prepared by magnetron sputtering at oblique angles for application as anodes and buffer layers in solid oxide fuel cells

García‐García

Yubero

González‐Elipe

et al. 2015

International Journal of Hydrogen Energy

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“…The open circuit voltages (OCV) of both cells were 1.08-1.17 V, depending on the temperature, that is close to the theoretical value of the SOFC. Compared with that of other cells based on PVD deposited thin film electrolytes, 32,33) the OCV value is fairly high and stable. The peak power densities of the cell without AFL were 132, 469, and 950 mW=cm 2 at 600, 700, and 800 °C, respectively.…”

Section: Resultsmentioning

confidence: 77%

Reactive co-sputter deposition of nanostructured cermet anodes for solid oxide fuel cells

Ионов¹,

Solovyev²,

Шипилова³

et al. 2017

Jpn. J. Appl. Phys.

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The impact of a nanostructured NiO/yttria-stabilized zirconia (NiO/YSZ) and NiO/gadolinia-doped ceria (NiO/GDC) anode functional layers on low-and intermediate-temperature solid oxide fuel cell (SOFC) performance is investigated. NiO/YSZ and NiO/GDC thin films were reactively sputter-deposited by pulsed direct current magnetron sputtering from the Ni, Zr-Y, and Ce-Gd targets onto commercial NiO/YSZ substrates. Anode-supported SOFCs based on magnetron sputtered YSZ and GDC electrolytes (>4 µm) with and without the nanostructured anode layers are fabricated. A direct comparison of the YSZ-and GDC-based SOFCs in temperature range of 600-800 and 400-600°C is made. The performance of cells with the nanostructured anode layers significantly increases as compared to that of the cell without it, especially at lower temperatures. Increase of cells performance was achieved by reduction of the total area-specific resistance by 26-30%.

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“…tests performed on SOFCs containing magnetron sputtered electrolytes with a columnar structure have shown an electrochemical performance comparable to or worse than cells containing tape cast electrolytes and not a significant improvement as would be expected from the reduced electrolyte thickness [18,19]. This lack of performance is related to leaks in the electrolyte due to the columnar morphology.…”

Section: Introductionmentioning

confidence: 95%

Deposition of yttria-stabilized zirconia thin films by high power impulse magnetron sputtering and pulsed magnetron sputtering

Sønderby

Aijaz

Helmersson

et al. 2014

Surface and Coatings Technology

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Yttria-stabilized zirconia (YSZ) thin films were reactively sputter-deposited by high power impulse magnetron sputtering (HiPIMS) and pulsed direct current magnetron sputtering (DCMS). The use of substrate bias voltage was studied in both modes of deposition as a process parameter to promote the growth of dense and less columnar films. Films were deposited on both Si(100) and NiO-YSZ fuel cell anodes. The texture, morphology and composition of the deposited films were investigated with regard to their application as thin electrolytes for solid oxide fuel cells (SOFCs). Independent of the deposition mode the films were found to be stoichiometric. The application of substrate bias voltage had opposite effects on texture and crystallinity of films deposited by pulsed DCMS and HiPIMS. Films deposited by pulsed DCMS became highly crystalline and <220> textured at high bias voltage whereas bias applied to HiPIMS deposited films disrupted crystal growth leading to deterioration of crystallinity. Comparing film morphology, it was found that pulsed DCMS films were columnar and contained voids regardless of the applied substrate bias. When depositing by HiPIMS a window of operation at a bias voltage of -25 V to -50 V was found in which it is possible to deposit non-columnar thin films without voids and cracks as desired for SOFC applications.

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Optimization of DC Reactive Magnetron Sputtering Deposition Process for Efficient YSZ Electrolyte Thin Film SOFC

Cited by 26 publications

References 27 publications

Porous, robust highly conducting Ni-YSZ thin film anodes prepared by magnetron sputtering at oblique angles for application as anodes and buffer layers in solid oxide fuel cells

Porous, robust highly conducting Ni-YSZ thin film anodes prepared by magnetron sputtering at oblique angles for application as anodes and buffer layers in solid oxide fuel cells

Reactive co-sputter deposition of nanostructured cermet anodes for solid oxide fuel cells

Deposition of yttria-stabilized zirconia thin films by high power impulse magnetron sputtering and pulsed magnetron sputtering

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