Optimization of Al-doped zinc oxide grown on sapphire using dual-plasma-enhanced metal organic chemical vapor deposition for InGaN/GaN light-emitting diodes

Lei, Po-Hsun; Hsu, Ching-Tien; Lin, Chun-Li; Fan, Yu-Siang; Ye, Sheng-Jhan

doi:10.1109/inec.2013.6465993

2013 IEEE 5th International Nanoelectronics Conference (INEC) 2013

DOI: 10.1109/inec.2013.6465993

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Optimization of Al-doped zinc oxide grown on sapphire using dual-plasma-enhanced metal organic chemical vapor deposition for InGaN/GaN light-emitting diodes

Po-Hsun Lei

Ching-Tien Hsu

Chun-Li Lin

et al.

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Optimization of Al-doped zinc oxide grown on sapphire using dual-plasma-enhanced metal organic chemical vapor deposition for InGaN/GaN light-emitting diodes

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References 7 publications

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