Optimization of a guided-mode resonance filter by varying the thickness of the buffer layer

Abstract

In this Letter, we demonstrate that by adjusting the thickness of the buffer layer, the optical responses of a guided-mode resonance filter (GMRF) can be improved for sensor applications. The GMRF is fabricated using a replica molding with a plastic substrate and a UV-curable polymer. SiO 2 buffer layers of different thicknesses are deposited before the waveguide-layer deposition. The sensitivity of the GMRFs decreases slightly with increasing SiO 2 layer thickness. By contrast, the full width at half-maximum reduces substantially with increasing SiO 2 layer thickness, resulting in the improvement of the overall figure of merit.