Optimization of a Collapsed Mode CMUT Receiver for Maximum Off-Resonance Sensitivity

Khan, Mubarak Ali; Khan, Talha Masood; Tasdelen, A. Sinan; Yılmaz, Mehmet; Atalar, Abdullah; Köymen, H.

doi:10.1109/jmems.2018.2857444

Cited by 7 publications

(4 citation statements)

References 19 publications

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“…Capacitive clamped membranes offer high electromechanical coupling in comparison with other sensors such as piezoelectric structures used for mass sensing [ 88 , 89 ]. The few drawbacks of the capacitive clamped membranes are poor selectivity and baseline drift, which is also the case with microcantilever and microbridge structures.…”

Section: Discussionmentioning

confidence: 99%

Capacitive Based Micromachined Resonators for Low Level Mass Detection

et al. 2020

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Advancements in microfabrication technologies and novel materials have led to new innovations in miniaturized gas sensors that can identify miniscule changes in a complex environment. Micromachined resonators with the capability to offer high sensitivity and selectivity in array integration make mass loading a potential mechanism for electronic nose applications. This paper investigates the mass sensing characteristics of progressive capacitive based micromachined resonators as potential candidates for volatile organic compound detection where also there is a need for miniaturized array configuration. In this paper, a detailed investigative review of the major three geometric designs of capacitive based micromachined resonators, namely, the microcantilever, the microbridge and the clamped membrane sensors is performed. Although many reviews are present in literature regarding mass sensors, however there is a gap in the literature regarding the common capacitive based micromachined mass sensors. This research gives a review on the foundation for capacitive based micromachined mass sensors while highlighting the potential capabilities of each geometric design to be developed further. Moreover, this paper also introduces the advancements based on the geometric designs of the capacitive based micromachined mass sensors. An in-depth analysis is done for each geometric design, to identify the critical design parameters, which affect the sensors’ performances. Furthermore, the theoretically achievable mass sensitivity for each capacitive based micromachined mass sensor is modeled and analyzed using finite element analysis with mass variation in the picogram range. Finally, a critical analysis is done on the sensor sensitivities and further discussed in detail wherein each design is compared to each other and its current advances. Additionally, an insight to the advantages and disadvantages associated with each simulated geometry and its different advances are given. The results of the investigative review and analysis indicate that the sensitivities of the capacitive based micromachined sensors are dependent not only on the material composition of the devices but also on the varying degrees of clamping between the sensor geometries. In essence, the paper provides future research the groundwork to choose proper candidate geometry for a capacitive based micromachined mass sensor, with its several advantages over other mass sensors, based on the needed application.

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Section: Discussionmentioning

confidence: 99%

Capacitive Based Micromachined Resonators for Low Level Mass Detection

et al. 2020

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“…The loss angle is material dependent, based on the dielectric insulation used. Here, the loss angle is set to silicon dioxide (SiO 2 ) accordingly, which is the insulation material used for the CMUT design, with δ = 0.001 [30]. Note that the dielectric losses may have prominent effects in the low frequency range.…”

Section: A Cmut Noise With Parasitic Componentsmentioning

confidence: 99%

Thermal-Mechanical Noise Modeling and Measurements of a Row-Column Addressed CMUT Probe

Merrien

Boulme²,

Certon

2022

IEEE Open J. Ultrason., Ferroelect., Freq. Contr.

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Thermal-Mechanical (T-M) noise is a natural phenomenon occurring in Capacitive Micromachined Ultrasonic Transducers (CMUT). T-M noise is a value of great interest because it is linked to the minimal detectable pressure of a transducer and can also serve as a convenient characterization tool. Indeed, the general behavior of a CMUT array is translated through its T-M noise which does not require any external applied source to be assessed. However, T-M noise is difficult to measure, often time requires a dedicated measurement chain and is mostly based on spectrum analyzers in a carefully controlled environment. In this paper, we present a temporal technique to characterize the T-M noise of CMUT-based arrays with a commercially available amplifier and a digital oscilloscope. The approach is applied to an air coupled Row-Column Addressed (RCA) matrix array, for which the elements cannot be measured with traditional microprobes systems. This task is performed using a Printed Circuit Board (PCB) dedicated to the characterization of RCA arrays and designed to drive rows and columns individually. Noise Power Spectral Density (PSD) modeling of the complete measurement chain is achieved using a lumped-parameter model of the RCA array element and using the amplifier gain, electrical impedance, and noise characteristics. Measurements obtained with the signal analyzer and the temporal method are in good agreement with the model. The presented characterization technique can be extended to other micromachined ultrasonic transducer probe architectures, technologies, and amplification systems.

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“…For the conventional CMUT, the maximum displacement occurs at the center of the membrane, while for the collapse CMUT, the maximum displacement is equal to the gap height. From [ 42 , 48 , 54 ], thin plates refer to the membrane whose lateral dimensions w are in the range of 10 ≤

≤ 100 or at least an order more than the membrane thickness, and CMUTs fall into this category [ 47 , 48 , 52 , 56 , 57 , 58 ].…”

Section: Static Membrane Deflection Modelsmentioning

confidence: 99%

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

Wang

Liu²,

et al. 2021

Micromachines

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Analytical modeling of capacitive micromachined ultrasonic transducer (CMUT) is one of the commonly used modeling methods and has the advantages of intuitive understanding of the physics of CMUTs and convergent when modeling of collapse mode CMUT. This review article summarizes analytical modeling of the collapse voltage and shows that the collapse voltage of a CMUT correlates with the effective gap height and the electrode area. There are analytical expressions for the collapse voltage. Modeling of the membrane deflections are characterized by governing equations from Timoshenko, von Kármán equations and the 2D plate equation, and solved by various methods such as Galerkin’s method and perturbation method. Analytical expressions from Timoshenko’s equation can be used for small deflections, while analytical expression from von Kármán equations can be used for both small and large deflections.

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Optimization of a Collapsed Mode CMUT Receiver for Maximum Off-Resonance Sensitivity

Cited by 7 publications

References 19 publications

Capacitive Based Micromachined Resonators for Low Level Mass Detection

Capacitive Based Micromachined Resonators for Low Level Mass Detection

Thermal-Mechanical Noise Modeling and Measurements of a Row-Column Addressed CMUT Probe

A Review on Analytical Modeling for Collapse Mode Capacitive Micromachined Ultrasonic Transducer of the Collapse Voltage and the Static Membrane Deflections

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