Optimization and Experiment of Electromagnetic Energy Harvester by Using NdFeB Sputtered on High-aspect-ratio Corrugated Si

Yamaguchi, Kohei; Tanaka, Yuji; Fujita, Takayuki; Takehira, Noritaka; Sonoda, Koji; Kanda, Kensuke; Maenaka, Kazusuke

doi:10.1088/1742-6596/557/1/012056

Cited by 3 publications

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“…Applying the double-sided magnet to our previous device [6], the curvature radius of moving mass will be improved. Figure 1a shows an SEM photograph of the sputtered NdFeB/Ta multilayer film on a silicon trench structure with depth of 300 µm by using a deep-RIE (reactive ion etching) process.…”

Section: Introductionmentioning

confidence: 99%

Flatness Improvement of Double-Sided Magnetic Film for Narrow Gap Electromagnetic Energy Harvester

et al. 2018

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This paper reports the design, modeling and preliminary fabrication result of the flatness improved magnetic film on a silicon structure for narrow-gap electromagnetic (EMG) vibration energy harvester (VEH). The harvester has double-sided corrugated shape silicon vibration mass with 15 µm-thick NdFeB permanent magnet. The narrower air-gap between the magnetic film and a counter coil electrode the higher output power. While the sputtered magnetic film shows good characteristics equivalent to a bulk magnet, it hinders to reduce the air-gap because the silicon structure was curved by its high residual stress. Applying the double-sided magnet to our previous device, the curvature radius of moving mass with 15 µm-thick NdFeB film was improved from 5.3 m to 40.1 m because of the stress compensation. With the narrowed 2 µm air-gap device, the resulting simulated output power is 48 µW that is 190 times as large as previous device.

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Section: Introductionmentioning

confidence: 99%