Optimization and application of Electron Beam Absorbed Current technique

Resistive Open Defect Isolation in Nano-Probing

“…Due to the high gain amplification, even pA level of absorbed current can be collected by the signal probe, the current pass through a resistive open is usually more than pA, therefore the entire signal trace can be highlighted in EBAC image. [2] However, in the two-terminal EBAC setup, because of the additional ground probe, the absorbed electrons take the least resistance path to the ground, some current can discharge into the ground probe, instead of passing through the resistive open into the signal probe, so only the trace that is between the resistive open and the signal probe will be highlighted. By collecting two complementary two-terminal EBAC images, the resistive open defect can be preciously localized.…”