Optimal design of advanced distillation configuration for enhanced energy efficiency of waste solvent recovery process in semiconductor industry

Chaniago, Yus Donald; Minh, Lê Quang; Khan, Mohd Shariq; Koo, Kee-Kahb; Bahadori, Alireza; Lee, Moonyong

doi:10.1016/j.enconman.2015.03.086

Cited by 32 publications

(18 citation statements)

References 29 publications

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“…Chaniago et al [17] adopted a thermally coupled distillation and a heat pump-assisted distillation sequence for reducing operation costs for solvent recovery. The proposed distillation configuration achieved 40.5% energy saving compared to the conventional column sequence.…”

Section: Energy Conservation and Efficient Utilizationmentioning

confidence: 99%

Clean, efficient, affordable and reliable energy for a sustainable future

Lee

Yan

Chou

et al. 2015

Energy Conversion and Management

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Section: Energy Conservation and Efficient Utilizationmentioning

confidence: 99%

Clean, efficient, affordable and reliable energy for a sustainable future

Lee

Yan

Chou

et al. 2015

Energy Conversion and Management

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“…Emerging technologies may provide alternative greener fabrication processes and improved capability to select raw materials with reduced hazardous waste [ 204 ]. For example, pollutants from the incineration of photoresists during the waste treatment phase may be reduced or mitigated [ 184 ]. Whether the discussed ASD and DSA techniques present such an opportunity has yet to be determined.…”

Section: Materials Challenges In Environmental Safety Health and Sustainability In The Semiconductor Industrymentioning

confidence: 99%

“…Consumable electronics generally get disposed of within a few years [28]. Recovery and reuse of water, acids and other chemicals would help resolve waste issues [178,184]. However, the purity of recovered waste might be compromised which makes recovery not always profitable [178].…”

Section: Reducing Wastementioning

confidence: 99%

Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective

Mullen

Morris

2021

Nanomaterials

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The turn of the 21st century heralded in the semiconductor age alongside the Anthropocene epoch, characterised by the ever-increasing human impact on the environment. The ecological consequences of semiconductor chip manufacturing are the most predominant within the electronics industry. This is due to current reliance upon large amounts of solvents, acids and gases that have numerous toxicological impacts. Management and assessment of hazardous chemicals is complicated by trade secrets and continual rapid change in the electronic manufacturing process. Of the many subprocesses involved in chip manufacturing, lithographic processes are of particular concern. Current developments in bottom-up lithography, such as directed self-assembly (DSA) of block copolymers (BCPs), are being considered as a next-generation technology for semiconductor chip production. These nanofabrication techniques present a novel opportunity for improving the sustainability of lithography by reducing the number of processing steps, energy and chemical waste products involved. At present, to the extent of our knowledge, there is no published life cycle assessment (LCA) evaluating the environmental impact of new bottom-up lithography versus conventional lithographic techniques. Quantification of this impact is central to verifying whether these new nanofabrication routes can replace conventional deposition techniques in industry as a more environmentally friendly option.

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“…(2014) Developed a software toolbox to assess binary solvent recoverability from both the economic and environmental perspectives Only distillation and pervaporation technologies were considered. Only binary solvents were considered; no multi-component solvents Chaniago et al. (2015) Implemented the box and quadratic programming approach to minimize the energy required for the distillation-based solvent recovery process in the semiconductor industry.…”

Section: Solvent Recovery In Practicementioning

confidence: 99%

Systems level roadmap for solvent recovery and reuse in industries

2021

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Summary Recovering waste solvent for reuse presents an excellent alternative to improving the greenness of industrial processes. Implementing solvent recovery practices in the chemical industry is necessary, given the increasing focus on sustainability to promote a circular economy. However, the systematic design of recovery processes is a daunting task due to the complexities associated with waste stream composition, techno-economic analysis, and environmental assessment. Furthermore, the challenges to satisfy the desired product specifications, particularly in pharmaceuticals and specialty chemical industries, may also deter solvent recovery and reuse practices. To this end, this review presents a systems-level approach including various methodologies that can be implemented to design and evaluate efficient solvent recovery pathways.

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Optimal design of advanced distillation configuration for enhanced energy efficiency of waste solvent recovery process in semiconductor industry

Cited by 32 publications

References 29 publications

Clean, efficient, affordable and reliable energy for a sustainable future

Clean, efficient, affordable and reliable energy for a sustainable future

Green Nanofabrication Opportunities in the Semiconductor Industry: A Life Cycle Perspective

Systems level roadmap for solvent recovery and reuse in industries

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