Optimal Design of a Center Support Quadruple Mass Gyroscope (CSQMG)

Zhang, Tian; Zhou, Bin; Yin, Peng; Chen, Zhiyong; Zhang, Rong

doi:10.3390/s16050613

Cited by 26 publications

(17 citation statements)

References 27 publications

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“…For our north finder prototype, a custom in-house CSQMG gyroscope was made. With an in-plane dual tuning fork resonator and differential signal extraction, the common mode linear interferences such as acceleration and shock are rejected [ 30 ]. Thanks to the well-designed symmetric MEMS structure, the nominal g -sensitivity of the MEMS gyroscope is around 7°/h/g for the gyro input axis and 3°/h/g for the other two perpendicular axes.…”

Section: Experimental Results and Error Analysismentioning

confidence: 99%

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A Novel MEMS Gyro North Finder Design Based on the Rotation Modulation Technique

Zhang

Zhou

Song

et al. 2017

Sensors

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Gyro north finders have been widely used in maneuvering weapon orientation, oil drilling and other areas. This paper proposes a novel Micro-Electro-Mechanical System (MEMS) gyroscope north finder based on the rotation modulation (RM) technique. Two rotation modulation modes (static and dynamic modulation) are applied. Compared to the traditional gyro north finders, only one single MEMS gyroscope and one MEMS accelerometer are needed, reducing the total cost since high-precision gyroscopes and accelerometers are the most expensive components in gyro north finders. To reduce the volume and enhance the reliability, wireless power and wireless data transmission technique are introduced into the rotation modulation system for the first time. To enhance the system robustness, the robust least square method (RLSM) and robust Kalman filter (RKF) are applied in the static and dynamic north finding methods, respectively. Experimental characterization resulted in a static accuracy of 0.66° and a dynamic repeatability accuracy of 1°, respectively, confirming the excellent potential of the novel north finding system. The proposed single gyro and single accelerometer north finding scheme is universal, and can be an important reference to both scientific research and industrial applications.

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Section: Experimental Results and Error Analysismentioning

confidence: 99%

“…In our prototype, a center support quadruple mass gyroscope (CSQMG) [30] made in-house and Colibrys MEMS accelerometer VS1002 were used. The measured Allan deviation curves of the MEMS gyro and accelerometer are displayed in Figure 3.…”

Section: Design and Implementationmentioning

confidence: 99%

A Novel MEMS Gyro North Finder Design Based on the Rotation Modulation Technique

Zhang

Zhou

Song

et al. 2017

Sensors

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“…Relative to the earlier QMG which measured 8 × 8 mm 2 [18,19], the device presented in this paper is 16 times smaller in area and is vacuum-sealed at the wafer-level using the episeal process [20]. The resonator is formed from a 40 µm thick single-crystal silicon layer, encapsulated at a low pressure (1 Pa) by an epitaxial silicon layer in order to achieve high Q (85 000).…”

Section: Designmentioning

confidence: 99%

Operation of a high quality-factor gyroscope in electromechanical nonlinearities regime

Taheri-Tehrani

Defoort

Horsley

2017

J. Micromech. Microeng.

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This paper describes the operation of a high quality factor gyroscope in various regimes where electromechanical nonlinearities introduce different forms of amplitude-frequency (A-f ) dependence. Experiments are conducted using an epitaxially-encapsulated 2 × 2 mm 2 quad-mass gyroscope (QMG) with a quality factor of 85 000. The device exhibits thirdorder Duffing nonlinearity at low bias voltages (15 V) due to the mechanical nonlinearity in the flexures and at high bias voltages (35 V) due to third-order electrostatic nonlinearity. At intermediate voltages (~26 V), these third-order nonlinearities cancel and the amplitudefrequency dependence is greatly reduced. A model is developed to demonstrate the connection between the electromechanical nonlinearities and the amplitude-frequency dependence, also known as the backbone curve. Gyroscope operation is demonstrated in each nonlinear operating regime and the key performance measures of the gyroscope's performance, angle random walk (ARW) and bias instability, are measured as a function of drive-mode vibration amplitude. We find that low ARW can be achieved even though the gyroscope's drive mode exhibits large amplitude-frequency dependence, and that bias instability is largely independent of the operating regime.

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“…A total of forty vertical stop blocks and eight lateral stop blocks are fabricated to restrict the PM’s range of motion and prevent possible contacting between the PM and the surrounding electrodes, as well as to effectively overcome the potential adhesion problem. The MESA device is fabricated with bulk micromachining based on the silicon on glass (SOG) technique [ 17 , 21 ]. To maintain stable suspension, the motion of the PM in all six DoFs, i.e.…”

Section: Design and Operation Of The Mesamentioning

confidence: 99%

“…This kind of nonlinear amplitude-frequency characteristics is mainly caused by the negative position stiffness ( K x ) inherently in electrostatic suspension. The overall suspension stiffness of the closed-loop system, which represents the rejection ability to external disturbing force, is defined as [ 21 ]:

…”

Section: Electrostatic Suspension Of the Pm With Feed-forward Compmentioning

confidence: 99%

Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

Yin

Sun

Han

2016

Sensors

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A micromachined electrostatically-suspended accelerometer (MESA) is a kind of three-axis inertial sensor based on fully-contactless electrostatic suspension of the proof mass (PM). It has the potential to offer broad bandwidth, high sensitivity, wide dynamic range and, thus, would be perfectly suited for land seismic acquisition. Previous experiments showed that it is hard to lift up the PM successfully during initial levitation as the mass needs to be levitated simultaneously in all six degrees of freedom (DoFs). By analyzing the coupling electrostatic forces and torques between three lateral axes, it is found there exists a self-locking zone due to the cross-axis coupling effect. To minimize the cross-axis coupling and solve the initial levitation problem, this paper proposes an effective control scheme by delaying the operation of one lateral actuator. The experimental result demonstrates that the PM can be levitated up with six-DoF suspension operation at any initial position. We also propose a feed-forward compensation approach to minimize the negative stiffness effect inherent in electrostatic suspension. The experiment results demonstrate that a more broadband linear amplitude-frequency response and higher suspension stiffness can be achieved, which is crucial to maintain high vector fidelity for potential use as a three-component MEMS geophone. The preliminary performance tests of the three-axis linear accelerometer were conducted under normal atmospheric pressure and room temperature. The main results and noise analysis are presented. It is shown that vacuum packaging of the MEMS sensor is essential to extend the bandwidth and lower the noise floor, especially for low-noise seismic data acquisition.

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Optimal Design of a Center Support Quadruple Mass Gyroscope (CSQMG)

Cited by 26 publications

References 27 publications

A Novel MEMS Gyro North Finder Design Based on the Rotation Modulation Technique

A Novel MEMS Gyro North Finder Design Based on the Rotation Modulation Technique

Operation of a high quality-factor gyroscope in electromechanical nonlinearities regime

Self-Locking Avoidance and Stiffness Compensation of a Three-Axis Micromachined Electrostatically Suspended Accelerometer

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