Abstract:The Taguchi method is widely used for the optimization of mechanical design and this study is used it in the design of a 2D circular flexure hinge for a z-tilt piezoelectric based nano-scale compensation stage. Maximum displacement of the stage is 16 µm at z-axis and ±30 arcsec at θ x and θ y. The most important design parameters for such a flexure hinge are minimal diameter, body height, and notch radius. The important requirements for the optimal design of a flexure hinge is that the z-tilt stage should have… Show more
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