Optimal deformation procedure for hybrid adaptive x-ray mirror based on mechanical and piezo-driven bending system

Abstract

A hybrid deformable x-ray mirror consisting of a mechanical bender and a bimorph deformable mirror has been developed to realize adaptive optical systems, such as zoom condenser optics, for synchrotron-radiation-based x-ray microscopy. In the developed system, both bending mechanisms comprehensively contribute to the formation of the target mirror shape and can narrow the role of piezoelectric actuators, thereby enabling a more stable operation. In this study, the behavior of the bimorph mirror under the clamped condition was investigated, and the sharing of the deformation amount for each bending mechanism was optimized to minimize the amplitude of the voltage distribution of the bimorph mirror.

Realization of a Cost-Effective Deformable Grating for the Extreme-Ultraviolet

“…Different bending mechanisms have been proposed [8,9], each of them try to cope with the different problems that the bending action produces: the parasitic forces and the gravity sag to cite the more evident ones. To maintain the design approach economic, we decide to use a s-spring design based on a single stepper actuator.…”