2011
DOI: 10.3130/jaabe.10.257
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Optimal Airflow Performance for FOUP Systems in Cleanrooms Using SVE Quantification Method

Abstract: This research examined the possibility of optimizing airflow performance of cleanrooms with FOUP (Front Opening Unified Pod) systems used in 300mm wafer lines for VLSI production. Numerical simulations using computational fluid dynamics (CFD) were carried out to obtain airflow states in cleanrooms with various design conditions. Each result was evaluated using a new quantification method and the cleanroom performance was then compared to it. The proposed method was based on the idea of Scale for Ventilation Ef… Show more

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“…Scale of ventilation efficiency (SVE), the set of indices (1 ~ 6) introduced by Murakami and Kato (1992), was considered as well 46 . SVE indices, especially SVE3 and SVE6 have been used in multiple studies to assess ventilation systems, 47‐49 or as a performance evaluation method base 50 . Nevertheless, SVE2 has also been used to estimate the contaminant diffusion radius 51 although not as widely.…”
Section: Resultsmentioning
confidence: 99%
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“…Scale of ventilation efficiency (SVE), the set of indices (1 ~ 6) introduced by Murakami and Kato (1992), was considered as well 46 . SVE indices, especially SVE3 and SVE6 have been used in multiple studies to assess ventilation systems, 47‐49 or as a performance evaluation method base 50 . Nevertheless, SVE2 has also been used to estimate the contaminant diffusion radius 51 although not as widely.…”
Section: Resultsmentioning
confidence: 99%
“…46 SVE indices, especially SVE3 and SVE6 have been used in multiple studies to assess ventilation systems, [47][48][49] or as a performance evaluation method base. 50 Nevertheless, SVE2 has also been used to estimate the contaminant diffusion radius 51 although not as widely. SVE2 was calculated as per equations (4~6).…”
Section: Numerical Indices (Local Air Quality Index and Contaminants ...mentioning
confidence: 99%