Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching

Lenssen, Blk Bo; Bellouard, Yves

doi:10.1063/1.4750236

Cited by 48 publications

(22 citation statements)

References 18 publications

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“…While semiconductors are the standard material for the manufacturing of MEMS, the potential of glass-based materials for developing MEMS has also been investigated [4], and several groups have already demonstrated electrostatic glass actuators [5][6][7]. These developments open up the possibility of realizing equivalent electrically controlled mechanical systems based on glass optical fibers.…”

Section: Introductionmentioning

confidence: 99%

Design of dual-core optical fibers with NEMS functionality

Podoliak¹,

Loh²,

Horák³

2014

Opt. Express

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An optical fiber with nano-electromechanical functionality is presented. The fiber exhibits a suspended dual-core structure that allows for control of the optical properties via nanometer-range mechanical movements. We investigate electrostatic actuation achieved by applying a voltage to specially designed electrodes integrated in the cladding. Numerical and analytical calculations are preformed to optimize the fiber and electrode design. Based on this geometry an all-fiber optical switch is investigated; we find that optical switching of light between the two cores can be achieved in a 10 cm fiber with an operating voltage of 35 V.

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Section: Introductionmentioning

confidence: 99%

Design of dual-core optical fibers with NEMS functionality

Podoliak¹,

Loh²,

Horák³

2014

Opt. Express

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“…The machining of three-dimensional structures in a dielectric and transparent substrate such as fused silica offers additional benefits such as the possibility to implement separated conductive tracks and to be optically transparent. As an illustration, a monolithic optically transparent capacitive glass actuator was recently demonstrated [16]. As shown for femtosecond micromachined Foturan glass substrates [17,18], electrodes-less metal plating [19] may also provide an alternative solution for integrating electrical functionalities.…”

Section: Open Accessmentioning

confidence: 99%

Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

Tielen

Bellouard

2014

Micromachines

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Abstract:Flexures are components of micro-mechanisms efficiently replacing classical multi-part joints found at the macroscale. So far, flexures have been limited to two-dimensional planar designs due to the lack of a suitable three-dimensional micromanufacturing process. Here we demonstrate and characterize a high-strength transparent monolithic three-dimensional flexural component fabricated out of fused silica using non-ablative femtosecond laser processing combined with chemical etching. As an illustration of the potential use of this flexure, we propose a design of a Hoecken linkage entirely made with three-dimensional cross-spring pivot hinges.

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“…Fused silica presents an interesting material for study, particularly due to its use in the fabrication of a wide variety of devices [2,4,6,32,36,37]. When fabricating these devices, laser-induced anisotropy can have adverse effects on production time, defects, and overall device reliability.…”

Section: Fused Silicamentioning

confidence: 99%

Visualization of femtosecond laser-induced stress anisotropy in amorphous and crystalline materials

McMillen

Chen

Bellouard

2015

MATEC Web of Conferences

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Abstract. In recent years, micro manufacturing with femtosecond lasers has received considerable attention as an efficient technique for producing three-dimensional devices, combining multiple functionalities in a single monolithic substrate. In this manufacturing process, stress-anisotropy resulting from non-ablative laser exposure can have both positive and negative effects on the process out-come. In this work, we present a simple method for visualizing stress anisotropy, combining highly symmetric laser-written patterns with polarization microscopy, as a tool for identifying the various anisotropic contributions to the laser fabrication process.

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Optically transparent glass micro-actuator fabricated by femtosecond laser exposure and chemical etching

Cited by 48 publications

References 18 publications

Design of dual-core optical fibers with NEMS functionality

Design of dual-core optical fibers with NEMS functionality

Three-Dimensional Glass Monolithic Micro-Flexure Fabricated by Femtosecond Laser Exposure and Chemical Etching

Visualization of femtosecond laser-induced stress anisotropy in amorphous and crystalline materials

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