2019
DOI: 10.1103/physrevapplied.12.044024
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Optically Active Defects at the SiC/SiO2 Interface

Abstract: The SiC/SiO 2 interface is a central component of many SiC electronic devices. Defects intrinsic to this interface can have a profound effect on their operation and reliability. It is therefore crucial to both understand the nature of these defects and develop characterization methods to enable optimized SiCbased devices. Here we make use of confocal microscopy to address single SiC/SiO 2-related defects and show the technique to be a noncontact, nondestructive, spatially resolved and rapid means of assessing … Show more

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Cited by 22 publications
(22 citation statements)
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References 44 publications
(58 reference statements)
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“…Contradicting explanations of the nature of these dangling bonds can be found in the literature, suggesting either carbon [33][34][35][36] or silicon dangling bonds [37][38][39]. Considering the large number of zero-phonon lines observed in low and room temperature PL for similar oxidation processes on 4H-C [40,41], correlated C dangling bonds with large varieties of possible geometries and backbone structures as proposed in Ref. [33] might be likely candidates.…”
Section: Discussionmentioning
confidence: 77%
“…Contradicting explanations of the nature of these dangling bonds can be found in the literature, suggesting either carbon [33][34][35][36] or silicon dangling bonds [37][38][39]. Considering the large number of zero-phonon lines observed in low and room temperature PL for similar oxidation processes on 4H-C [40,41], correlated C dangling bonds with large varieties of possible geometries and backbone structures as proposed in Ref. [33] might be likely candidates.…”
Section: Discussionmentioning
confidence: 77%
“…The emission spectra for the 18 O SPSs tended to be blue shifted, slightly narrower peak widths, and higher intensities if compared to natural oxygen annealing indicating that oxygen was incorporated into the defects attributed to the surface emitters [130]. These surface defects are by themselves remarkably interesting for applications, and they have been recently used to assess the quality of the SiC/SiO 2 interface [131]. Here a systematic investigation of the defect density of the SiC/SiO 2 interface was performed by varying the parameters of nitric oxide passivation anneal after oxidation.…”
Section: Optically and Electrically Driven Single Photon Sources (Spss)mentioning
confidence: 99%
“…The SiC/SiO 2 interface can have a profound impact on the optical properties of SiC. [ 6 ] Optically active defects with emission in the red part of the spectrum may be related to carbon clusters which form at or near the interface during oxidation. This is described by the “Carbon Cluster Model.” [ 115,116 ] The density of these optically active defects that reside at the SiC/SiO 2 interface can be reduced by post‐oxidation annealing in NO or N 2 O ambient.…”
Section: Sic Nanoparticlesmentioning
confidence: 99%
“…This is described by the “Carbon Cluster Model.” [ 115,116 ] The density of these optically active defects that reside at the SiC/SiO 2 interface can be reduced by post‐oxidation annealing in NO or N 2 O ambient. [ 6 ] These annealing conditions result in high concentrations of N at the SiC/SiO 2 interface which is thought to passivate the excess carbon. [ 117 ]…”
Section: Sic Nanoparticlesmentioning
confidence: 99%
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