2014
DOI: 10.1117/1.oe.53.3.034108
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Optical three-dimensional vibrometer microscope with picometer-resolution in x, y, and z

Abstract: Abstract. The state-of-the-art technique for optical vibration analysis of macroscopic structures is laser-Doppler vibrometry in which a single-laser beam measures the motion in the beam direction. Thus, three laser beams are necessary to investigate three-dimensional (3-D) motions. The laser spots can be separated on macroscopic specimens with scattering surfaces to prevent optical crosstalk between the measurement beams, but such separation is impossible for a microscopic scatter point. We demonstrate a solu… Show more

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Cited by 28 publications
(12 citation statements)
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“…Optical approaches aiming at determining position vectors with ultra-small localization errors include laser interferometry [2][3][4][5][6] , laser Doppler vibrometry [7][8][9] , fluorescence-based single-molecule localization [10][11][12][13] , light-scattering-based single-particle localization 14 , localization by optical superoscillations from metasurfaces 15 , and optical-image cross-correlation analysis [16][17][18][19][20][21] .…”
Section: Atomic Scale Displacements Detected By Optical Image Cross-cmentioning
confidence: 99%
“…Optical approaches aiming at determining position vectors with ultra-small localization errors include laser interferometry [2][3][4][5][6] , laser Doppler vibrometry [7][8][9] , fluorescence-based single-molecule localization [10][11][12][13] , light-scattering-based single-particle localization 14 , localization by optical superoscillations from metasurfaces 15 , and optical-image cross-correlation analysis [16][17][18][19][20][21] .…”
Section: Atomic Scale Displacements Detected By Optical Image Cross-cmentioning
confidence: 99%
“…The displacement phase-modulates the wave in proportion to the change in optical path length. The degree of phase modulation is determined with heterodyne interferometry and is converted to a complex amplitude of displacement u(x,y), where u is the projection of the displacement vector onto the optical axis of the beam [37]. For a full characterization of the sample's motion in 3D, separate LDV experiments from different directions are needed.…”
Section: Laser-doppler Vibrometrymentioning
confidence: 99%
“…A recently published solution [62] allows 3D measurements with just a single measurement beam by collecting light from three directions and evaluating the directional Doppler effect. This solution is especially well suited for small structures since the laser spot is just defined by the central impinging beam which can be focused with a microscope objective.…”
Section: D Scanning Vibrometermentioning
confidence: 99%