Optical system design of the Voltage Imaging^TMoptical subsystem (VIOS) in AMLCD in-process test system (IPT)

10.4: Non‐Contact Current Measurements for AMOLED Backplanes Using Electron‐Beam‐Induced Plasma Probes

“…Electrical testing of Thin-Film Transistor (TFT) backplanes used in Liquid Crystal Displays is usually done using voltage measurement techniques such as Photon Dynamic's, an Orbotech Company, Voltage Imaging TM technology [1] or secondary electron voltage measurements [2]. Voltage imaging TM technology has also successfully been applied to Active Matrix Organic Light Emitting Diode (AMOLED) displays.…”