2022
DOI: 10.1007/s10853-021-06712-5
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Optical, structural and morphological studies of nanostructures fabricated on silicon surface by femtosecond laser irradiation

Abstract: We report here a detailed analysis of the ultrashort laser pulse irradiation effects on a single crystalline silicon surface. A systematic study has been performed to understand the surface morphological changes under irradiation with ultrashort laser pulses by changing different input laser parameters such as laser fluence, laser pulse number, and incident laser polarization. Field emission scanning electron microscopy images reveal the formation of laser induced periodic sub-wavelength surface structures dir… Show more

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Cited by 3 publications
(4 citation statements)
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“…Moreover, the observed nano-droplets/particles on the top of patterned surfaces could be due to the re-deposition and solidification of fashioned molten layer during the laser interaction with the target in the vicinity of ambient liquid [87,88]. Kuladeep et al [89] have recently investigated the effect of fs laser fluence and pulse numbers for the generation of LIPSS on a Si substrate. While increasing the pulse numbers along the with laser fluence (0.2 J cm −2 -0.5 J cm −2 ), they noticed the decrease in the periodicity.…”
Section: Number Of Pulsesmentioning
confidence: 99%
“…Moreover, the observed nano-droplets/particles on the top of patterned surfaces could be due to the re-deposition and solidification of fashioned molten layer during the laser interaction with the target in the vicinity of ambient liquid [87,88]. Kuladeep et al [89] have recently investigated the effect of fs laser fluence and pulse numbers for the generation of LIPSS on a Si substrate. While increasing the pulse numbers along the with laser fluence (0.2 J cm −2 -0.5 J cm −2 ), they noticed the decrease in the periodicity.…”
Section: Number Of Pulsesmentioning
confidence: 99%
“…Silicon, with its remarkable semiconductor properties, nontoxicity, and abundance in the earth's crust, has found widespread application in the microelectronics industry. [1][2][3][4][5][6][7] However, as semiconductor technology has progressed, Moore's Law appears to have reached a bottleneck. As a result, researchers have turned their attention towards silicon optoelectronic integration technology as a new direction.…”
Section: Introductionmentioning
confidence: 99%
“…In recent years, many physical techniques such as UV irradiation, lithography, UV irradiation, ultrasonic fields and laser ablation have been used successfully to produce nanoparticles 49 . Pulsed laser ablation in liquid (PLAL) method gives permission to produce versatile NPs and this technique compared to chemical methods known as a green synthesized method with minimum chemicals 50,51 . PLAL is a powerful technique for production of NPs experimentally.…”
Section: Introductionmentioning
confidence: 99%
“…49 Pulsed laser ablation in liquid (PLAL) method gives permission to produce versatile NPs and this technique compared to chemical methods known as a green synthesized method with minimum chemicals. 50,51 PLAL is a powerful technique for production of NPs experimentally. Compared to other physical procedures, PLAL is particularly common because of its unique characteristics such as being rapid and simple, not requiring the use of hazardous chemicals, producing long-term stable dispersions, and being performed at room temperature.…”
Section: Introductionmentioning
confidence: 99%