Abstract. We present a new kind of fluorescent oxide nanoparticles (NPs) with properties well suited to active-tip based near-field optics. These particles with an average diameter in the 5 to 10 nm range are produced by Low Energy Cluster Beam Deposition (LECBD) from a YAG:Ce 3+ target. They are studied by transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), cathodoluminescence, near-field scanning optical microscopy (NSOM) and fluorescence in the photon-counting mode. Particles of extreme photo-stability as small as 10 nm in size are observed. These emitters are validated as building blocks of active NSOM tips by coating a standard optical tip with a 10 nm thick layer of YAG:Ce 3+ particles directly in the LECBD reactor and by subsequently performing NSOM imaging of test surfaces.