2011
DOI: 10.1016/j.tsf.2011.02.064
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Optical rib waveguides based on sol-gel derived silica–titania films

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Cited by 51 publications
(28 citation statements)
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“…Moreover it is hard to synthesize functional glass of optical quality with perfectly homogeneous refractive index and being cracks free. Thus, up to now, the sol-gel method has been used to fabricate thin films that are subsequently processed using different types of lithographic processes such as standard photolithography [195][196][197][198], two-photon laser processing [199], and soft imprinting [200]. A recent review of the results achieved so far is in [201].…”
Section: Sol-gelmentioning
confidence: 99%
“…Moreover it is hard to synthesize functional glass of optical quality with perfectly homogeneous refractive index and being cracks free. Thus, up to now, the sol-gel method has been used to fabricate thin films that are subsequently processed using different types of lithographic processes such as standard photolithography [195][196][197][198], two-photon laser processing [199], and soft imprinting [200]. A recent review of the results achieved so far is in [201].…”
Section: Sol-gelmentioning
confidence: 99%
“…The details concerning fabrication technology of the silica titania and titania lms are given in Ref. [11,21]. The morphological parameters of the investigated composite waveguide as well as of the parent slab waveguide are schematically presented in Fig.…”
Section: Composite Structurementioning
confidence: 99%
“…Ultra clean soda-lime glass substrates (microscope slides, Menzel-Glaser), was cleaned by a method described in the Ref. 15. The films were deposited on the cleaned substrates by dip coating method.…”
Section: Films Fabricationmentioning
confidence: 99%
“…It is of interest for use as gas sensor [1, 2], photoinduced optical operated materials [3], solar cell [4][5][6], photocatalyst [7][8][9], selfcleaning glasses [10], electrochromic films [11], antireflection coatings [12] and transparent conductors [13]. Titanium dioxide is also a principal component used in planar waveguide technology [14,15]. Several synthesis methods concerning titanium dioxide thin films are described in the literature, such as e-beam evaporation [2], magnetron sputtering [7,16], ultrasonic spray pyrolysis [17], chemical vapor deposition [18,19], metal organic chemical vapor deposition [13], pulsed laser deposition [20], and sol-gel method [1, 5,6,[9][10][11][12][13].…”
Section: Introductionmentioning
confidence: 99%