Optical properties of VO<sub>2</sub> thin films deposited on different glass substrates

Dai, Kai; Lian, Jie; Miller, Mark J.; Wang, JunLan; Shi, Yujun; Liu, Yuxiang; Song, Haizheng; Wang, Xiao

doi:10.1364/ome.9.000663

Cited by 24 publications

(10 citation statements)

References 35 publications

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“…However, in both samples the complex refractive index decreases with increasing wavelengths from 250 to 2500 nm. These results are consistent with optical constants such as n and k obtained from VO 2 thin films deposited on silica-soda-lime and silica-potash-soda using a UHV magnetron sputtering system, reported by Dai et al 30 . Similarly, Kana et al 31 fabricated VO 2 thin films onto various glass substrates by radiofrequency inverted cylindrical magnetron sputtering and then investigated temperature-dependent studies on optical constants.…”

Section: Resultssupporting

confidence: 92%

Infrared optical properties modulation of VO2 thin film fabricated by ultrafast pulsed laser deposition for thermochromic smart window applications

Barimah

Boontan

Steenson

et al. 2022

Sci Rep

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Over the years, vanadium dioxide, (VO2(M1)), has been extensively utilised to fabricate thermochromic thin films with the focus on using external stimuli, such as heat, to modulate the visible through near-infrared transmittance for energy efficiency of buildings and indoor comfort. It is thus valuable to extend the study of thermochromic materials into the mid-infrared (MIR) wavelengths for applications such as smart radiative devices. On top of this, there are numerous challenges with synthesising pure VO2 (M1) thin films, as most fabrication techniques require the post-annealing of a deposited thin film to convert amorphous VO2 into a crystalline phase. Here, we present a direct method to fabricate thicker VO2(M1) thin films onto hot silica substrates (at substrate temperatures of 400 °C and 700 °C) from vanadium pentoxide (V2O5) precursor material. A high repetition rate (10 kHz) femtosecond laser is used to deposit the V2O5 leading to the formation of VO2 (M1) without any post-annealing steps. Surface morphology, structural properties, and UV–visible optical properties, including optical band gap and complex refractive index, as a function of the substrate temperature, were studied and reported below. The transmission electron microscopic (TEM) and X-ray diffraction studies confirm that VO2 (M1) thin films deposited at 700 °C are dominated by a highly texturized polycrystalline monoclinic crystalline structure. The thermochromic characteristics in the mid-infrared (MIR) at a wavelength range of 2.5–5.0 μm are presented using temperature-dependent transmittance measurements. The first-order phase transition from metal-to-semiconductor and the hysteresis bandwidth of the transition were confirmed to be 64.4 °C and 12.6 °C respectively, for a sample fabricated at 700 °C. Thermo-optical emissivity properties indicate that these VO2 (M1) thin films fabricated with femtosecond laser deposition have strong potential for both radiative thermal management or control via active energy-saving windows for buildings, and satellites and spacecraft.

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Section: Resultssupporting

confidence: 92%

Infrared optical properties modulation of VO2 thin film fabricated by ultrafast pulsed laser deposition for thermochromic smart window applications

Barimah

Boontan

Steenson

et al. 2022

Sci Rep

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“…Unlike electro-refractive effects which generate relatively small refractive index perturbations, optical phasetransition and phase-change materials boast gigantic refractive index contrast (with Δn usually well-exceeding unity) upon undergoing a solid-state phase transition. This unique behavior is identified in a handful of correlated oxides exemplified by vanadium dioxide (VO 2 ) [118][119][120] and chalcogenide compounds, such as Ge-Sb-Te (GST) or Ag-In-Sb-Te (AIST) alloys which switch between amorphous and crystalline phases [121][122][123][124]. The structural origins of the optical contrast in correlated oxides and chalcogenides are, however, fundamentally different.…”

Section: Optical Phase-change Mediamentioning

confidence: 99%

Design for quality: reconfigurable flat optics based on active metasurfaces

et al. 2020

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Optical metasurfaces, planar subwavelength nanoantenna arrays with the singular ability to sculpt wavefront in almost arbitrary manners, are poised to become a powerful tool enabling compact and high-performance optics with novel functionalities. A particularly intriguing research direction within this field is active metasurfaces, whose optical response can be dynamically tuned postfabrication, thus allowing a plurality of applications unattainable with traditional bulk optics. Designing reconfigurable optics based on active metasurfaces is, however, presented with a unique challenge, since the optical quality of the devices must be optimized at multiple optical states. In this article, we provide a critical review on the active meta-optics design principles and algorithms that are applied across structural hierarchies ranging from single meta-atoms to full meta-optical devices. The discussed approaches are illustrated by specific examples of reconfigurable metasurfaces based on optical phase-change materials.

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“…Эта программа выполняла расчет параметров пленочных слоев по измеренным величинам и . Расчет производился на базе стандартных эллипсометрических уравнений [14].…”

Section: образцы и методика экспериментаunclassified

“…Несмотря на это, данные по эллипсометрии легированных пленок диоксида ванадия в литературе представлены мало. А именно, имеется работа [14], в которой эллипсометрическим методом исследованы пленки VO 2 : Na и VO 2 : K. Но механизм изменения оптических констант вблизи T C -точки ФПИМ -остается неясным. Также имеется работа [15], где изучены показатель преломления n и коэффициент экстинкции k в очень широком диапазоне длин волн (300 nm−30 µm).…”

Section: Introductionunclassified

Эллипсометрия нанокристаллических пленок VO-=SUB=-2-=/SUB=-, VO-=SUB=-2-=/SUB=- : Mg, VO-=SUB=-2-=/SUB=- : Ge

Kastro¹,

Il’inskiĭ²,

Смирнова³

et al. 2021

Физика Твердого Тела

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The spectra of the refractive index n(λ) and the extinction coefficient k(λ) of thin VO2, VO2: Mg, VO2:Ge films were measured using the ellipsometric method. For an undoped VO2 film at a wavelength λ = 632.8 nm, near the insulator-metal phase transition, the n(T) and k(T) thermal hysteresis loops were studied. An interpretation of the results is given on the base of the Moss relation, the idea of a change in n(T) and k(T) with an impurity variation of the material density, and also on the base of the ideology of the Coulomb transformation of the density of states function in strongly correlated materials.

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Optical properties of VO₂ thin films deposited on different glass substrates

Cited by 24 publications

References 35 publications

Infrared optical properties modulation of VO2 thin film fabricated by ultrafast pulsed laser deposition for thermochromic smart window applications

Infrared optical properties modulation of VO2 thin film fabricated by ultrafast pulsed laser deposition for thermochromic smart window applications

Design for quality: reconfigurable flat optics based on active metasurfaces

Эллипсометрия нанокристаллических пленок VO-=SUB=-2-=/SUB=-, VO-=SUB=-2-=/SUB=- : Mg, VO-=SUB=-2-=/SUB=- : Ge

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Optical properties of VO2 thin films deposited on different glass substrates

Cited by 24 publications

References 35 publications

Infrared optical properties modulation of VO2 thin film fabricated by ultrafast pulsed laser deposition for thermochromic smart window applications

Infrared optical properties modulation of VO2 thin film fabricated by ultrafast pulsed laser deposition for thermochromic smart window applications

Design for quality: reconfigurable flat optics based on active metasurfaces

Эллипсометрия нанокристаллических пленок VO-=SUB=-2-=/SUB=-, VO-=SUB=-2-=/SUB=- : Mg, VO-=SUB=-2-=/SUB=- : Ge

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Optical properties of VO₂ thin films deposited on different glass substrates