Optical properties of titanium nitride thin films

Tompkins, Harland G.; Gregory, R. B.; Boeck, B.

doi:10.1002/sia.740170107

Cited by 13 publications

(4 citation statements)

References 14 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Metallic behavior of TiN combined with its hardness and chemical stability has attracted attention in microelectronics research [5]. Adjustable optical properties and stoichiometry of TiN thin films were examined in the 1990s [6]. The optical characterization of TiN thin films was extensively performed later with the increasing interest in the field of plasmonics [7][8][9][10].…”

mentioning

confidence: 99%

“…4 Adjustable optical properties and stoichiometry of TiN thin films were examined in the 1990s. 5 Optical characterization of TiN thin films was extensively performed later with the increasing interest in the field of plasmonics. [6][7][8][9] Improved properties with epitaxial TiN thin films have recently been demonstrated with a hyperbolic metamaterial and a plasmonic waveguide.…”

mentioning

confidence: 99%

See 1 more Smart Citation

Colloidal Plasmonic Titanium Nitride Nanoparticles: Properties and Applications

et al. 2015

View full text Add to dashboard Cite

Optical properties of colloidal plasmonic titanium nitride nanoparticles are examined with an eye on their photothermal and photocatalytic applications via transmission electron microscopy and optical transmittance measurements. Single crystal titanium nitride cubic nanoparticles with an average size of 50 nm, which was found to be the optimum size for cellular uptake with gold nanoparticles [1], exhibit plasmon resonance in the biological transparency window and demonstrate a high absorption efficiency. A self-passivating native oxide at the surface of the nanoparticles provides an additional degree of freedom for surface functionalization. The titanium oxide shell surrounding the plasmonic core can create new opportunities for photocatalytic applications. an excitement to develop technologies for a broad range of applications. The wide range of carrier concentrations available from several material classes spans the electromagnetic spectrum from the ultra-violet through the midinfrared [2]. Additionally, the broad variety of materials studied in the field provide extra degrees of freedom to solve technological challenges thanks to the unique properties such as tunability, process compatibility, chemical stability, etc [3]. KeywordsTransition metal nitrides, especially titanium nitride (TiN), have been studied for the last three decades due to the unique combination of their material properties [4]. Metallic behavior of TiN combined with its hardness and chemical stability has attracted attention in microelectronics research [5]. Adjustable optical properties and stoichiometry of TiN thin films were examined in the 1990s [6]. The optical characterization of TiN thin films was extensively performed later with the increasing interest in the field of plasmonics [7][8][9][10]. Improved properties with epitaxial TiN thin films have recently been demonstrated with a hyperbolic metamaterial and a plasmonic waveguide [11,12]. As a refractory plasmonic material, TiN holds the potential to solve critical issues associated with the softness and low melting points of plasmonic metals such as gold and silver [13,14]. In contrast to thin films, TiN nanoparticles have not been extensively studied until recently. Localized surface plasmons (LSPs) in TiN nanoparticles were first theoretically analyzed by Quinten [15], while their first experimental demonstration was performed by Reinholdt et al. [16] In their work, cubic nanoparticles smaller than 10 nm with a broad size dispersion were fabricated through laser ablation, and plasmon resonance peaks centered around 730 nm wavelength were reported. Reinholdt et al. proposed the use of TiN nanoparticles as inorganic, stable color pigments. We have previously shown that TiN nanoparticles provide field enhancement comparable to that achievable with Au, with a broader peak spectrally positioned in the biological transparency window [17]. In a more recent study, we experimentally analyzed the absorption efficiencies of lithographically fabricated TiN and Au nanoparticles an...

show abstract

mentioning

confidence: 99%

mentioning

confidence: 99%

Colloidal Plasmonic Titanium Nitride Nanoparticles: Properties and Applications

et al. 2015

View full text Add to dashboard Cite

show abstract

“…After nitridation, the scattering peaks blue‐shifts with respect to the counterparts before nitridation because the shell converts from dielectric a‐TiO 2 into plasmonic TiN. [ 20 ] Figure 4i gives the statistic shift of scattering speak induced by nitridation. The shift is dependent on the a‐TiO 2 shell thickness.…”

Section: Resultsmentioning

confidence: 99%

“…Particularly, the refractory nature endows metal nitrides with excellent thermal stability. In addition, the dielectric properties of titanium nitride can be tuned by varying its stoichiometry, [ 20 ] which increases another way to tune the plasmon resonances. Therefore, titanium nitride is believed to be a promising plasmonic material which can overcome the drawbacks of gold and silver.…”

Section: Introductionmentioning

confidence: 99%

Nanostructures Composed of Dual Plasmonic Materials Exhibiting High Thermal Stability and SERS Enhancement

Wang

Mei

et al. 2021

Part & Part Syst Charact

View full text Add to dashboard Cite

Ohmic losses and high direct current conductivity. Nevertheless, some inherent downsides of gold and silver limit their use for practical applications. First, the noble nature makes the application cost of gold and silver nanostructures relatively high. Second, gold and silver are not compatible with standard silicon manufacturing process because they can diffuse into silicon to form deep traps which severely jeopardize the performance of nanoelectronic devices. [9][10][11] Third, nanostructured gold and silver have poor thermal stability. [12] The shape of gold and silver nanostructures is prone to evolve into spheres at elevated temperature. Such transformation should be avoided in LSPR applications because the LSPR properties are highly dependent on the shape of nanostructures. [13] Because of these shortcomings of conventional gold and silver plasmonic materials, many efforts have been devoted to searching for alternatives. [14][15][16] Titanium nitride, which is well known for its excellent hardness (covalent TiN bonding), high electric conductivity, high chemical and thermal stability (melting temperature ≈3000 °C), [12] has been extensively used in microelectronics and as hard coatings. [17,18] TiN has similar optical properties to gold, reflected by that the bulk TiN has golden color, and the TiN nanostructures have comparable resonance peak to the gold counterparts. [19] Hence, titanium nitride exhibits good plasmonic properties in the visible and longer wavelengths. [14][15][16]19] Compared with gold and silver, metal nitrides are low-cost and compatible with silicon. Particularly, the refractory nature endows metal nitrides with excellent thermal stability. In addition, the dielectric properties of titanium nitride can be tuned by varying its stoichiometry, [20] which increases another way to tune the plasmon resonances. Therefore, titanium nitride is believed to be a promising plasmonic material which can overcome the drawbacks of gold and silver. However, titanium is extremely active to react with oxygen, which makes the preparation of titanium nitride very difficult. Although titanium films with patterns are readily prepared by chemical vapor deposition, [21] atomic layer deposition, [22] and physical vapor deposition, [23] it is quite challenging to prepare free titanium nitride nanoparticles with uniform and controllable size. Compared with titanium films, titanium nitride nanoparticles are highly desired in many photochemical and biological applications because of their solution dispersible nature and LSPR. In spite of that titanium nitride nanoparticles have been prepared by reactive laser ablation and various plasma technique;, [24,25] As one kind of alternative to conventional metals, titanium nitride offers many advantages in the rapidly growing fields of plasmonics and metamaterials. However, the development of TiN x -based plasmonics is severally limited by the difficulty in the preparation. Herein, a facial approach is developed for the preparation of Au@TiN x core-shell nanostructures. T...

show abstract