Optical properties of single crystal diamond microfilms fabricated by ion implantation and lift-off processing

Diamond photonics for distributed quantum networks

“…In this respect the commercially grown starting materials may be improved through template-assisted re-polishing [88]. Membranes of uniform thickness have been produced using helium ion bombardment to form a well-controlled sub-surface damaged layer, which is then sacrificed through selective chemical etching followed by lift-out [92,93,94]. The residual ion damage in the layer through which the helium ions have passed is deleterious to coherent single colour centre properties [95] (section 3.4), however it has been shown that these membranes can be suitable for the subsequent overgrowth of highquality single crystal material [96,91], which has been combined with the delta-doping method to create high-quality free-standing nanobeam cavities (section 5.1.1) [97].…”

“…High-energy ion bombardment of single crystal diamond followed by homoepitaxial overgrowth of high quality membranes provides another route towards membrane suspension as the damaged layer can be selectively etched [97,93,96,92]. Micromanipulation and lift out of as-fabricated membranes [93,94,92] could also be employed to enable a free standing structure, however this serial technique is naturally slower than parallel fabrication processes.…”

Cross‐Sectional Investigation of Multihigh‐Energy Proton‐Implanted Single Crystalline Diamond

“…Recently, ion beam lithography has been extensively used for the fabrication of a broad spectrum of diamond‐based devices such as micro‐/nanomechanical resonators, [ 1,2 ] waveguides, [ 3–5 ] photonic structures, [ 6–8 ] and graphitic conductive channels which are indispensably required for the realization of ionizing radiation detectors, infrared radiation emitters, and field emitters. [ 9–12 ] In addition, it is noteworthy that diamond is also an attractive candidate for fabricating cellular biosensors due to its inherent biocompatibility.…”